Process engineer, ion beam, ion implant, thin film, photolithography

SUMMARY:

Expert in thin film deposition, characterization, and data analysis. Highly motivated, mission and detail oriented, team-work spirited, excellent communication and presentation skills, independent thinker and fast learner, organized, creative, adaptable to new tasks or duties, time and cost conscientious, work well under pressure.

EXPERIENCE:

Research assistant: University of Houston, Houston, TX. Date: 06/2005 – 12/2009. Worked on multi-projects including:

• Transparent conductors of Nb-doped In2O3 epitaxial thin films by magnetron sputtering. Characterization by chemical, magneto-electrical, optical, and laser spectroscopic methods. (06/2007-12/2009) (Ph.D. dissertation)

• Deposition of various ultrathin film gate dielectrics by atomic layers deposition (ALD) on silicon wafers, mechanical and optical coating planar geometry and beads: participated in installation of Nano Cambridge Savannah 100, worked as a super user. SEM-based EDS and optical n&k analysis for composition and thickness. (07/2008-10/2009)

• Silicon wafer surface modification by Gas Cluster Ion Beam (GCIB): Fractal and correlation length of ripple pattern description was found using my own analysis code developed in Matlab. (05/2006-05/2007)

• Photolithography patterning for ion implantation on Si wafers: Designed mask pattern using AutoCAD. Photolithography using the mask and low energy N2 ion implantation allowed for successful nanorod growth. (09/2005-04/2006)

• HfO2 gate dielectrics and YBa2Cu3O7- thin film superconductor by pulsed laser deposition (PLD): Studied crystalline structure and surface morphology analysis by X-ray Diffraction (XRD) and atomic force microscopy (AFM). (06-08/2005)

Teaching assistant: University of Houston, Houston, TX. Date: 08/2004 – 06/2005

Instructed undergraduate physics laboratory.

Teaching assistant: Tecnologico de Monterrey, Monterrey, NL, Mexico. Date: 08/2003 – 05/2004

Instructed undergraduate physics laboratory.

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EDUCATION:

Ph.D., Physics: 08/2006–12/2009, University of Houston, Houston, TX, USA.

Dissertation title: Consequences of Nb-doping to In2O3, a magneto-transport and optical study of a novel thin film transparent conductor. Advisor: Dr. Wei-Kan Chu. GPA: 3.84/4.0

M. S., Physics: 08/2004–07/2006. University of Houston, Houston, TX, USA. GPA: 3.73/4.0

B. S., Physics engineering: 08/1999–05/2004. Tecnologico de Monterrey, Monterrey, NL, Mexico. GPA:9.0/10.0

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TECHNICAL SKILLS

• Thin film deposition: magnetron sputtering / Pulsed Laser Deposition (PLD) / Atomic Layer Deposition (ALD) / e-beam evaporation. Including materials science of thin films, hands-on experience in troubleshooting and giving maintenance to vacuum pumps or any other part in these machines.

• Characterization: Ion beam Rutherford Scattering Spectroscopy (RBS), RBS-Channeling, Proton-induced X-ray Emission (PIXE), X-ray Diffraction (XRD), Atomic Force Microscopy (AFM), Scanning Electron Microscopy (SEM) / EDX, X-ray Photoemission Spectroscopy (XPS). Optical: UV/Vis and FT-IR optical spectroscopy, optical ellipsometry measurement for index of refraction (n & k), variable-temperature photoluminescence spectroscopy (PL) and cathodoluminescence (CL), Raman. Magneto-transport: variable-temperature Hall measurement, low-temperature physics.

• Fabrication: Photolithography, spin coating, wet/dry etching methods, ion beam implantation, gas cluster-ion beam processing (GCIB).

• Software: Origin, C/C++, Matlab, Mathematica, Maple, Labview, AutoCAD, SCOUT, RBX, ImageJ, Multipack, MDI Jade, MS Office, Windows, Linux.

• Extensive experience in computer data analysis and interpretation.

• Knowledge of FMEA and SPC practices.

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LANGUAGES

Fluent in English and Spanish. Beginning French and Chinese.

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HONORS & AWARDS

3rd prize winner at the 32nd Student Symposium competition held at the Texas Center for Superconductivity at University of Houston (TcSUH), Fall 2006.

Title: Nano-ripple structure formation on Silicon surface by gas cluster ion beam.

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CAREER HIGHLIGHTS

• All the projects I have been involved during the Master and PhD program has been presented in different conferences:

APS March meeting 2006, 2007, 2008, and 2009. MRS spring meeting 2007. PSROC 2009. Look for O. Lozano. APS: American Physical Society | MRS: Material Research Society | PSROC: Physical Society of the Republic of China.

• 08/2008 – 10/2009: Research exchange study at Physics Department, National Sun Yat-Sen University, with Prof. Li-Wei Tu, Kaohsiung, Taiwan, ROC.

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PUBLICATIONS

• O. Lozano, Q.Y. Chen, P. V. Chinta, P. V. Wadekar, L. H. Chu, H.W. Seo, L.W. Tu, Y.S. Zhang, W.Y. Pang, Ikai Lo, S.W. Yeh, N. J. Ho, D. Wijesundera, Wei-Kan Chu, Electrical and optical properties of epitaxial highly transparent Nb-doped In2O3 thin films by co-sputtering, submitted to Journal of Physics D: Applied Physics.

• Priya. V. Chinta, Q.Y. Chen, O. Lozano, S.W. Yeh, H.W. Seo, L.W. Tu, N.J. Ho, Y.S. Chang, W.Y. Pang, Ikai Lo, and W.K. Chu, Effect of heavy doping on the electrical and optical properties of Al: ZnO films, submitted to Journal of Physics D: Applied Physics.

• H.W. Seo, Q.Y. Chen, L.W. Tu, M. Chen, X.M. Wang, C.L. Hsiao, Y.J. Tu, L. Shao, O. Lozano, Wei-Kan Chu, GaN nanorod assemblies on self-implanted (111) Si substrates, Microelectronic engineering 83, 1714-1717 (2006).

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