Semicodnuctor Integration Engineer

ISAAC RUIZ, Ph.D.

Albuquerque, NM ***** ************@*****.*** phone: 619-***-**** Active Q Clearance Summary of

Qualifications

• Experience in developing semiconductor fabrication process flows, mask layout designs and process tool recipe development (DoE) for electronic and optical applications.

• Extensive experience in carbon nanotube and 2-dimensional (graphene, h-BN, MoS2, WS2) nanomaterial synthesis by chemical vapor deposition (CVD), characterization of thin film electrical and chemical properties and FET simulations.

• Expert in fabricating graphene field effect transistors on various substrates (Si, Sapphire, III-V semiconductors, silica, LiNbO3).

• Expert in electrical characterization of 1D and 2D Field Effect Transistors at room and cryogenic temperatures.

• Regularly participate in cross-functional teams to meet hard mission critical deadlines, delivering product, written reports, clear and concise presentations and journal publications. Professional Experience

Sandia National Laboratories Albuquerque, NM

Principle Member of Technical Staff Sept 2020-Present

• Engineer for the W88 ALT 370 and W88 ALT 940 Technical Basis and Qualification department supporting the qualification program. Focus on execution of not only the W88 ALT 370 and ALT940 qualification testing, but future modernization programs as well. Sandia National Laboratories Albuquerque, NM

Senior Member of Technical Staff April 2018-Sept 2020

• Principle Investigator for process development and fabrication of graphene-based magnetic memory project.

• Leading growth and transfer process development for scalable, wafer scale, high mobility 2D material synthesis and transfer.

• Development and testing of graphene-based solid-state radiation (Gamma and High energy Ions) detectors on Si and compound semiconductors (GaAs, GaSb, InGaAs, InAsSb).

• Integration lead for graphene-based Silicon and III-V semiconductor fabrication processes for applications in detection from the midwave IR to UV and optical filtering. Sandia National Laboratories Albuquerque, NM

Postdoctoral Appointee Oct 2015-April 2018

• Led fabrication process development of graphene field effect transistor (G-FET’s) devices for applications in memory, optical detection and filtering ranging from the UV to mid IR.

• Integration of graphene with both Silicon and III-V semiconductor fabrication processes for visible to Mid-IR detection and filtering.

• Developed Sandia’s graphene CVD synthesis capabilities, including; growth, etch/clean and transfer of 2D materials onto various substrates.

• Designed and fabricated ultra-flat graphene lenses for optical communications.

• Developed process and fabrication methods for mid IR high Q resonators.

• Contributed towards the development of conductive 3D printed graphene polymers and graphene inks for printable/writable antennas.

Temiz Energy Technologies (TET USA), Riverside, CA Equipment Engineer/Intern July-Oct 2015

• Designed, built and qualified the CVD tools for the deposition of carbon and silicon nanomaterials for use as cathode and anode materials for the use in the next generation high energy storage lithium ion devices.

University of California Riverside, Riverside, CA

Graduate Student Researcher June 2010 – June 2015

• First demonstration of uniform monolayer films of graphene oxide on Cu foil by CVD.

• Identified, characterized and eliminated major source of contamination of graphene sheets synthesized on Cu foils by CVD, resulting in high quality uniform films.

• Studied and optimized Cu foil morphology, by electrochemical polishing, to synthesize uniform, self-limiting single layer graphene sheets with only a 60 second precursor exposure time and the elimination of an annealing step in the recipe.

• Synthesized carbon nanotubes (CNT’s) by CVD on various metal foils, including various CNT geometries; randomly oriented CNT’s, vertically aligned CNT’s, pillared graphene nanostructure (PGN) and cone shaped clusters for use in lithium ion batteries and super capacitors.

Cymer LLC San Diego, CA

DUV Chamber Materials Intern June – Sept 2014

• Experimentally measured the corrosion and erosion of metals/metal-alloys due to high temperature fluoridation to determine better performing electrode materials to be used in Deep Ultra Violet (DUV) photolithography tools in order to increase tool lifetime.

• Created model and experimental method to predict metal electrode performance in extreme high temperature, high pressure chamber conditions and reduced data experimental times and data collection from several months to a few days. International Rectifier (Infineon) Temecula, CA

Engineering Intern July - Sept 2013

• Reduced production process time by 30%, by implementation of endpoint detection during chamber clean in plasma enhance chemical vapor deposition (PECVD)(AMAT P5000) tools.

• Optimized PECVD (Novellus C-150) chamber clean recipe while reducing clean time and minimizing CFC precursor usage and lowering process cost.

• Created and implementation of operation specification procedure for film stress measurement utilized for statistical process control (SPC), which improved data reliability. Research and Engineering Experience

Semiconductor Fabrication

Ion Implantation/Activation

Rapid Thermal Annealing

Tube Furnace Annealing

Photolithography

Photoresist Development

Electron Beam Evaporator

Thermal Evaporator

Reactive Ion Etching

Induced Coupled Plasma

Etching

Metallization/Liftoff

Asher

Chemical Vapor Deposition

UV Ozone

Atomic Layer Deposition

Chip Packaging

Wet Etch

Material Characterization Techniques

Microscopy/Metrology

Optical

SEM

AFM

Profilometer

Spectroscopy

EDS

Raman

Optical Emission

Electrical

Four-Point Probe

Cap-Voltage

Current-Voltage

Cryogenic

Material Science

Reflectometry

Thin Film

Interference

Film Stress

Software and Programming

Maple

Matlab

LabVIEW

DW-2000 (Mask Layout Design)

Origin

Awards and Distinctions:

Graduate Research Mentorship Award (GRMP) 2011/2013/2014 Alliance for Graduate Education and Professionalism Fellowship (AGEP) 2010 SMART Grant 2008/2009

SDSU Dean’s List 2007/2008/2010

Education

University of California, Riverside 2015

Ph.D. Electrical Engineering GPA:3.7

Dissertation: Towards the Scalable Synthesis of Monolayer Graphene and Graphene Oxide Films University of California, Riverside 2013

M.S. Electrical Engineering GPA:3.62

San Diego State University 2010

B.S. Physics (Minor: Mathematics) GPA:3.11

Selected Publications

• I Ruiz, TE Beechem, G Vizkelethy, AD McDonald, PM Thelen, MD Goldflam, Deeply Depleted Graphene-Oxide-Semiconductor Junctions for High Energy Radiation Detection, (Submitted)

• A Jarzembski MD Goldflam, A Siddiqui, I Ruiz, TE Beechem, Enhancing graphene plasmonic device performance via its dielectric environment, (Accepted)

• MD Goldflam, I Ruiz, A Tauke-Pedretti, EM Anderson, JR Wendt, W Coon, TR Fortune, EA Shaner, J Olesberg, J Klem, MB Sinclair, JK Kim, DW Peters, T. E. Beechem, Monolithically- Fabricated Tunable Long-Wave Infrared Detectors Based on Dynamic Graphene Metasurfaces, Applied Physics Letters, (Accepted)

• I Ruiz, TE Beechem, S Smith, P Dickens, E Paisley, SW Howell, J Shank, R Sarma, BL Draper, MD Goldflam, Interface Defect Engineering for Improved Graphene-Oxide-Semiconductor Junction Photodetectors, ACS Applied Nanomaterials, 2, 10, 6162-6168 (2019)

• R Sarma, S Campione, MD Goldflam, J Shank, J Noh, LT Le, MD Lange, PD. Ye, J Wendt, I Ruiz, SW Howell, M Sinclair, MC. Wanke, Igal Brener, A metasurface optical modulator using voltage- controlled population of quantum well states, Applied Physics Letters, 113, 201101 (2018)

• R Sarma, S Campione, MD Goldflam, P Ye, J Noh, MB Sinclair, J Shank, I Ruiz, JF Klem, I Brener, Low Dissipation Spectral Filtering using a Field-Effect Tunable III-V Hybrid Metasurface, Applied Physics Letters, 113, 061108 (2018)

• MD Goldflam, I Ruiz, SW Howell, JR Wendt, MB Sinclair, DW Peters, TE Beechem, Dual-band graphene-based infrared reflectance filter, Optics Express, 26, 7, 8532 (2018)

• SW Howell, I Ruiz, PS. Davids, RK. Harrison, SW. Smith, MD. Goldflam, JB. Martin, NJ. Martinez, TE. Beechem, Graphene-Insulator-Semiconductor Junction for Hybrid Photodetection Modalities, Nature Scientific Reports, 7, 14651 (2017)

• I Ruiz, R Ionescu, S Shahrezaei, Z Mutlu, CS Ozkan, M Ozkan, Chemical Vapor Deposition of Partially Oxidized Graphene, RSC Advances, 7, (51-322**-***** (2017)

• I Ruiz, MD Goldflam, BL Draper, AE McDonald, TE Beechem, SW Howell, Visibility of Dielectrically Passivated Graphene Films, Optics Letters, 42-14-285*-**** (2017)

• R Ionescu, B Campbell, R Wu, E Aytan, A Patalano, I Ruiz, SW Howell, AE McDonald, TE Beechem, KA Mkhoyan, M Ozkan, CS. Ozkan, Chelant Enhanced Solution Processing for Wafer Scale Synthesis of Transition Metal Dichalcogenide Thin Films, Nature Scientific Reports, 7, (2017)

• MD Goldflam, Z Fei, I Ruiz, SW Howell, PS Davids, DW Peters, and TE Beechem, Designing graphene absorption in a multispectral plasmon-enhanced infrared detector, Optics Express, 25 (11), 12400- 12408 (2017)

• R Ionescu, I Ruiz, Z Favors, B Campbell, MR Neupaneb, D Wickramaratne, K Ahmed, Chueh Liu, N Abrahamian, Roger K. Lake, Mihri Ozkan, CS Ozkan, Two-step Growth Phenomena of MoS2/WS2, Heterostructure, RSC Chem Comm, 51 (56), 112**-***** (2015)

• W. Wang, I Ruiz, I Lee, K Ahmed, M. Ozkan and CS Ozkan, Improved Functionality of Carbon Materials by UV Ozone Treatment, RSC Nanoscale, 7 (16), 7045-7050 (2015)

• R Ionescu, A George, I Ruiz, Z Favors, Z Mutlu, C Liu, K Ahmed, R Wu, JS Jeong, L Zavala, K A Mkhoyan, M Ozkan and C S Ozkan, Oxygen Etching of Thick MoS2 Films, RSC Chemical Communications, 50 (76), 112**-***** (2014)

• I Ruiz, W Wang, AS George, M Ozkan, C Ozkan, Silicon Oxide Contamination of Graphene Sheets Synthesized on Copper Substrates Via Chemical Vapor Deposition, Advanced Science, Engineering and Medicine, 6-10-107*-**** (2014)

• R Ionescu, W Wang, Y Chai, Z Mutlu, I Ruiz, Z Favors, D Wickramaratne, M Neupane, L Zavala, R Lake, M Ozkan, C Ozkan, Synthesis of Atomically Thin MoS2 Triangles and Hexagrams and their Electrical Transport Properties, IEEE Nanotechnnology, 13, 4, 749-754 (2014)

• W Wang, I Ruiz, K Ahmed, HH Bay, AS George, J Wang, J Butler, M Ozkan, and CS Ozkan, Silicon Decorated Cone Shaped Carbon Nanotube Clusters for Lithium Ion Battery Anodes, Small (2014).

• D Pleskot, Z Mutlu, J Bell, I Ruiz, M Ozkan, CS Ozkan. Inch Scale High Throughput Metrology of Graphene and Graphene Oxide, Nano Communications, 1, 1, 45-51, (2014)

• W Wang, I Ruiz, S Guo, Z Favors, HH Bay, M Ozkan, and CS Ozkan, CS, Hybrid carbon nanotube and graphene nanostructures for lithium ion battery anodes. Nano Energy, 3, 113 (2014)

• W Wang, S Guo, M Penchev, I Ruiz, KN Bozhilov, D Yan, M Ozkan, C. Ozkan, Three dimensional few layer graphene and carbon nanotube foam architectures for high fidelity supercapacitors, Nano Energy 2 (2), 294-303, (2013)

• I Moreno, JA Davis, I Ruiz, DM Cottrell, Decomposition of radially and azimuthally polarized beams using a circular-polarization and vortex-sensing diffraction grating, Optics Express 18 (7), 7173-7183

(2010)

• JA Davis, MJ Mitry, MA Bandres, I Ruiz, KP McAuley, DM Cottrell, Generation of accelerating Airy and accelerating parabolic beams using phase-only patterns, Applied Optics 48 (17), 3170-3176

(2009)

Presentations

• Deeply Depleted Graphene-Oxide-Semiconductor Junctions on III-V Semiconductor Substrates for High Responsivity Photodetection, 78th Device Research Conference, June 21st, 2020 (Accepted)

• Depleted Graphene-Insulator-Silicon Junctions for High Energy Detection of Ions and Gamma Rays, GOMACTech 2020, San Diego, CA, March 16th, 2020 (Accepted)

• High Energy Ion and Gamma Detection using the Graphene-Insulator-Semiconductor Junction, 31st Rio Grande Symposium for Advanced Materials, Albuquerque, September 16th, 2019

• The Deeply Depleted Graphene-Insulator-Semiconductor Junction: A Versatile Approach Towards Light Sensing Across the Electromagnetic Spectrum, SPIE Nanoscience and Engineering, San Diego, August 11th, 2019

• Depleted Graphene-Oxide-Semiconductor Junctions for High Energy Radiation Detection, 77th Device Research Conference, Ann Arbor, June 23rd, 2019

• Depleted Graphene-Oxide-Semiconductor Junctions for Photo-generated Electron and Hole Detection, 30th Rio Grande Symposium for Advanced Materials, October 8th, 2018

• Transconductance Characteristics of P-type and N-type D2GOS Junction Photodectectors, 60th Electronics Materials Conference, Santa Barbara, June 27th-29th, 2018

• Passivation of Graphene Films and Their Visibility, 59th Electronics Materials Conference, South Bend, June 28th-30th, 2017

• Observing Atomically Thin Materials Encapsulated in Dielectrics, New Mexico AVS Symposium, Albuquerque, May 15th-18th, 2017

• Optical Contrast of Passivated Graphene Films, Rio Grande Symposium for Advanced Materials, Albuquerque, October 3rd, 2016

• Cu surface morphology effects on self-limiting single layer growth of graphene films by chemical vapor deposition, SPIE Optical Engineering + Applications Conference, San Diego, August 17th-21st, 2014

• Silica Contamination of Graphene Grown on Copper Foil by Chemical Vapor Deposition, Materials Research Society Conference, Spring 2014, San Francisco, April 21st-25th 2014 Intellectual Property

• Tunable IR Pixels via Monolithically Integrated Dynamic Metasurfaces, (Provisional Patent)

• Low-dissipation Metasurface-Based Voltage-Tunable Optical Modulator, (Disclosed TA)

• Graphene-Enabled On-Chip Spectroscopy for Massive SWAP Gains, (Disclosed TA)

• Tunable graphene-based infrared reflectance filter, US Application Number: 15/872,293 (Non- Provisional Patent Application)

• Radiation Detector Using a Graphene Amplifier Layer, US Application Number: 62/576,718 (Non- Provisional Patent Application)

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