Electrical Engineering Computer Science

Resume of Shu Qin, 617-***-****

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SHU QIN

** ******* **., #*

Malden, MA 02148

Tel: 617-***-****

E-mail: ******@*******.***

SUMMARY OF QUALIFICATIONS

30+ years extensive experience in both industry and academics on microelectronics including semiconductor device physics, advanced semiconductor processes particularly plasma-based processes, simulation and modeling of devices and processes EDUCATION

1992 Ph.D. in Electrical Engineering, Northeastern University, Boston, Massachusetts, USA M.S. in Electrical Engineering, Tsinghua University, Beijing, China B.S. in Electrical Engineering, Beijing University of Technologies, Beijing, China PROFESSIONAL EXPERIENCE

2004 - 2016 Senior Member Technical Staff – Micron Technology, Inc, Fab4/R&D Dept, Boise, ID, USA

• R&D of novel plasma-based processing on applications of DRAM, flash, CMOS image Sensor, and variety of Emerging Memories

2000 – 2003 Principal Scientist – Axcelis Technologies, Inc. (formerly Eaton Corp.), Technology Development Division, Beverly, Massachusetts, USA

• Advanced implanter and processing for SIMOX SOI wafer manufacturing

• R&D of novel plasma-based processing (Plasma Immersion Ion Implantation) for next generation microelectronics

• R&D of advanced Electrostatic Chuck (ESC) for high power ion implanters

• Simulation and modeling of device and semiconductor processing

• R&D for Rapid Thermal Processing (RTP) equipment for ultra-shallow junction processing 1997 – 2000 Principal Scientist - Silicon Genesis Corp., Campbell, California, USA

• Hydrogen Plasma Immersion Ion Implantation for Ion-cut SOI wafer manufacturing

• R&D of novel plasma-based processing for next generation microelectronics

• Prototype of advanced equipment for semiconductor processing

• Simulation and modeling of plasma processing

1991 - 1997 Research Scientist – Plasma Science and Microelectronics Lab, Dept. of ECE, Northeastern University, Boston, Massachusetts, USA

Research on microelectronics, semiconductor processing, plasma theory & processing

• Plasma-based ion implantation, deposition, and etching for semiconductors

• Research and fabrication of shallow junction-based IC and SOI devices by using novel doping technique

Resume of Shu Qin, 617-***-****

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• Fabrication and hydrogenation of poly-Si thin film transistors for AMLCD flat panel displays

• Fabrication and application of vacuum microelectronic field emitter array

• Novel plasma sources including ECR, helicon, Inductively-Coupled Plasma

• Plasma simulation and modeling

1993 - 1997 Consultant - Eaton Corp., Semiconductor Equipment Operations, Beverly, Massachusetts Research and development of novel plasma sources and ion implanter 1991- 1997 Co-Principal Investigator of several Research Funding - DARPA (Defense Advanced Research Projects Agency, USA), SEMATECH, XEROX PARC, EATON Corp., AMP Corp. 1987 –1991 Research Assistant and Teaching Assistant - Dept. of Electrical and Computer Engineering, Northeastern University, Boston, Massachusetts, USA

• Plasma immersion ion implantation and dry etching by microwave plasma for semiconductors

• SEMATECH project on multiple-processes for low-cost flexible IC manufacturing

• Project of BIST (built-in self-test) method of DFT (design for testability) technique for RAM

• Taught courses on semiconductor fabrication, VLSI, and Electronics 1986 - 1987 Senior Scientist - VLSI Lab, Dept. of Electrical Engineering and Computer Science, Lehigh University, Bethlehem, Pennsylvania, USA

• Standard cell design of VLSI by using VALID SCALDstar CAD system

• Installation and testing of Concorde silicon compiler on VALID SCALDstar

• DRC (design rule checking) programs for VALID SCALDstar system 1982 - 1986 Lecturer - Dept. of Applied Physics, Beijing Institute of Posts and Telecommunications, Beijing, China

• VLSI CAD on device and process simulations

• Taught courses on solid state electronics and VLSI CAD 1977 - 1982 Assistant Professor (Faculty Member) - Dept of Computer Science and Engineering, Tsinghua University, Beijing, China

• Two-dimensional finite element analysis program for semiconductor devices

• Research on laser aligned pattern generator and mask making software for VLSI design SEMICONDUCTOR PROCESS SKILLS

Processing Familiar with semiconductor processes, diagnostics, testing, and equipment, such as oxidation,

& Equipment: diffusion, ion implantation, rapid thermal annealing, photolithography, film deposition

(evaporation, sputtering, CVD), plasma dry etching; process diagnostics and device characterizations by SEM, TEM, SIMS, XPS, SRP, DHE, SSRM, Electron-Holography, ellipsometry, Dektak profiler, four-point probe, curve tracer, HP semiconductor analyzer, etc. JOURNAL REFEREE

IEEE Transaction on Electron Device, IEEE Electron Device Letters, IEEE Transaction on Plasma Science, Journal of Applied Physics, Applied Physics Letters, Plasma Source Science & Technology, etc.

55 US/FOREIGN PATENTS AND TOTAL 241 PUBLICATIONS REFERENCES IN PEER- REVIEWED JOURNALS AND CONFERENCES AND PUBLICATIONS FURNISHED UPON REQUEST

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