Process Engineering, Manufacturing Engineering, Photolithography

STEPHEN HU

Email: *******@*****.*** Tel: 817-***-**** Address: 1065 Dutcher Dr. Fishkill, NY 12524

EDUCATION

CORNELL UNIVERSITY, COLLEGE OF ENGINEERING

Aug. 2003 – Dec. 2007

ITHACA, NY

BACHELOR OF SCIENCE, MAJOR: MATERIALS SCIENCE & ENGINEERING

WORK EXPERIENCE

April 2011 - Present EAST FISHKILL,

IBM Corporation; Photolithography Staff Process Engineer

NY

• Process owner for seventeen TEL ACT12/Pro-V platform Lithography tools

• Responsible for processing across 365nm, 248nm, and 193nm wavelength litho technology

• Manage 1000+ photolithography process recipes used to process 14nm-90nm technologies

• Generate and analyzed SPC data to monitor tool performance

• Troubleshoot tool issues by collaborating with vendors and manufacturing teams on the floor

• Coordinate with development, manufacturing, and maintenance to solve critical yield issues

• Engage in manufacturing cost cutting initiatives, including $1M in chemical use/year

• Investigate litho related yield issues; implement yield improvement methods

• Strive to optimize overall manufacturing efficiency

• Mentored / trained newly hired process engineers

May 2008 – April 2011 SOUTH

National Semiconductor; Photolithography Process Engineer

PORTLAND, ME

• Process owner for FSI/TEL coater and developer tracks

• Start up and qualify tools to support aggressive production ramp

• Monitor SPC data from photo quals, and manage qual procedures and scheduling

• Engage in improvement teams focused on increasing tool availability

• Improve cycle time by reducing rework rate

• Qualify processes on new tools to expand manufacturing flexibility

• Collaborate with vendors to solve manufacturing chemical issues

ARLINGTON, TX

National Semiconductor; Photolithography Process Engineer

• Process owner for FSI/SSI coater and developer tracks

• Qualified photo processes to expand/sustain manufacturing capabilities

• Maintained tool and process level SPC on a daily basis

• Investigated quality incidents, determined root cause and executed containment measures

• Actively participated in lean manufacturing initiatives for ASML equipment

SKILLS / ABILITIES

Technical Skills Optical microscopy; macro and micro wafer inspection

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Scanning electron microscopy; profile imaging, feature measurement

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Process recipe creation/management for SSI, FSI, and TEL coat/develop tracks

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Characterization of resist thickness/uniformity

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Characterization of resist/developer defectivity using KLA Tencor particle inspection tools

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Total Productive Manufacturing (TPM) certified

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Analytical Ability Monitoring SPC data to maintain process stability and to determine out-of-control parameters

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Performing statistical analysis using JMP

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Generating CD swing curves and photoresist spin curves to determine process stability

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Focus exposure matrix / Bossung curve analysis to determine optimal process window

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Review of defect scans from optical inspection tools

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Computer Skills Proficient in Microsoft Office (Word, Excel, and PowerPoint)

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Proficient in statistical analysis with JMP and Excel

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Java, Matlab, Visual Basic

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HTML/CSS

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PERSONAL INTERESTS

Activities • Active member of U.S. Tennis Association and playing ranked singles, doubles and mixed doubles tennis matches

• High School math tutor (Trigonometry, Calculus)

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