MEMS Engineer

Jiahan Zhuang

Address: *** * **** **, ****, Philadelphia, PA 19104

Contact: ******.*****@*****.*** 215-***-****

EDUCATION

University of Pennsylvania, Philadelphia, PA, USA Sept. 2011- May 2013

Master of Science in Engineering in Mechanical Engineering and Applied Mechanics GPA: 3.80/4.00

Coursework: MEMS RF MEMS & NEMS Principles of Micro-fabrication Technology Finite Element Analysis & Applications Continuum Mechanics Advance Dynamics Design for Manufacturability Integrated Product Design Vector and Tensor Analysis Foundation of Engineering Mathematics

Dalian University of Technology, Dalian, China Sept. 2006 - June 2011

Bachelor of Science in Engineering (Honors) in Mechanical Design, Manufacturing and Automation GPA: 3.54/4.00

Coursework: Mechanical Theory Mechanical Design Mechanical Precision Design and Detecting Techniques Measuring Techniques for Mechanical Engineering Technique of Mechanical Machining Mechanical Engineering Materials Material Forming Technology Machining Technology Engineering Thermodynamics Fluid Mechanics and Hydraulic Drive Mechanics of Material Theoretical Mechanics Electronics Electric Technology Introduction to Control Engineering CAD/CAM Descriptive Geometry and Drawing

SKILLS

Techniques and Equipment: Wafer aligning (EVG 620) and wafer bonding (EVG 510), transfer printing, film casting (CEE200X, Headway, Laurell), lithography (Nanonex 2600, MA4, ELS-7500EX), PECVD (PlasmaLab 100), ALD (Savannah 200), PVD (PVD75), RIE (PlasmaLab 80+), DRIE, plasma etch (Planar Etch II), ICP etch (Phantom III), wet etch (HF, Nanostrip), ellipsometry (AutoEL IV-NIR3), profilometry (KLA Tencor P7), interferometry (Zygo New View 7300), ultra-sonicating (Branson 5510), spin-rinse-drying (Superclean 1600-3).

Cleanroom Experience: >1200 hr @ Wolf Nanofabrication Facility, University of Pennsylvania May 2012 - Oct. 2013

Software: COMSOL, Matlab, Mathematica, Solidworks, AutoCAD, C, Autodesk Inventor, UG, Adobe Photosohp, Adobe Illustrator, Microsoft Windows and Microsoft Office.

EMPLOYMENT

Research Assistant Turner Research Group, University of Pennsylvania May 2012 - Oct. 2013

• Concentrated on MEMS design and microfabrication.

Tool Manager Wolf Nanofabrication Facility, University of Pennsylvania Feb. 2013 - Oct. 2013

• Responsible for equipment test and maintenance, recipe optimization and user training.

Teaching Assistant Micro-Electro-Mechanical Systems (MEAM 550), University of Pennsylvania Jan. 2013 - May 2013

• Designed and presented lab experiments in the cleanroom, supervised teams on course projects and graded homework, quizzes and exams.

RESEARCH EXPERIENCE

Single Crystal Silicon Membrane Stacking with Mechanical Alignment Turner Research Group, University of Pennsylvania May 2012- Oct. 2013

• Designed and fabricated single crystal silicon membrane (from SOI wafer) with mechanical alignment features and SU-8 alignment posts.

• Designed and manufactured related transfer printing set-up and conducted transfer printing tests and membrane stacking tests.

• Established HF wet etch protocol, designed and manufactured related tools and maintained lab equipments.

• Applied shear-enhanced transfer printing to membrane stacking and analyzed related data for misalignment measurement via image processing.

Wafer Bonding Misalignment Measurement Turner Research Group, University of Pennsylvania Jan 2013 - Sept. 2013

• Designed and fabricated global marks for wafer bonding alignment and vernier scale pattern and Moiré pattern for misalignment measurement.

• Employed crosshair, overlay and transparent process modes in wafer alignment, and applied direct wafer bonding and anodic wafer bonding.

• Measured misalignment via vernier scale pattern and Moiré pattern and optimized alignment process and recipe.

Design for Manufacturability: Microsoft Wireless BlueTrack Mouse University of Pennsylvania Jan. 2012 - May. 2012

• Applied design for assembly, design for material and process selection, cost estimation and value engineering, design for supply chain and robust design to reduce target product cost and improve value.

• Employed BOM and cost model, FAST diagram, fishbone assembly diagram, Boothroyd-Dewhurst analysis, QFD, cost-worth matrix and diagram for comprehensive and in-depth analysis.

Adaptive Optics Mirror Array with Hybrid Actuation Mechanism Turner Research Group, University of Pennsylvania Sept. 2011 - Jan. 2012

• Designed and simulated hybrid electrothermal and electrostatic actuation mechanism.

• Improved the theoretical performance with larger continuous range of tilting angle and membrane deformation, less power consumption, shorter response time and better image quality with higher resolution.

Electrostatic Energy Harvesting Device Optimization Turner Research Group, University of Pennsylvania Sept. 2011 - Dec. 2011

• Designed and simulated a pyramid-shaped-fingers energy conversion unit to transfer pure mechanical vibrations into electrical energy.

• Simulation performed with higher total power conversion efficiency compared to present devices.

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