Richard “Doc” Wirkus
*** * **** **, ***********, OR 97478
***@***********.***
Objective: To work for a company where knowledge and skills acquired can improve
the department’s performance and profitability.
Highlights of Qualifications:
• Equipment Owner responsible for MTBF, MTTR and cost of the LAM Etch
chambers, 4528, 9600, 9600DFM, Exelan, 9400Se, and 9400Ptx on the A-6
Platform, eleven years.
• Experienced with troubleshooting etch rate issues, particle issues, vacuum leaks,
and electrical problems and implementing continuous improvement programs.
• Familiar with programs to reduce equipment cost including, revising of PM
procedures to reduce MTTR, reverse engineering problem parts, qualification of
second source parts, conversion to digital MFC’s, increasing MWBC, and
working with process engineering.
• Provided internal ISO auditing and was the departments ISO audit guide.
• Performance driven and Award winning, Employee of the quarter 2007,
Presidents’ award 2005, ISO auditor award 2004, Led the equipment team that
earned three-production bonus awards 2007. The company provided increasing
challenges through promotion, seven times in eleven years working under
different management.
Equipment Experience:
• LAM Research: LAM: 490,590, Rainbow 4420, A-6 cluster platforms with
9408Se, PTX, 9608 DFM, Rainbow 4528 and Exelan chambers
• Applied Materials: 8110, Mxp, Mxp+, DPS Metal, DPS Poly, 5300 HDP oxide
chambers
• Plasma Therm 360 and 368 Metal Etchers, and RIE etcher used in MA lab.
• Matrix ISO and Asher systems models 102, 105, 303
• Tegal 903e, 915, 515 and 415 models
• RF generators, Henry, ENI and Advanced energy.
• Fusion ACU and PCU systems
• Edwards and Ebara Dry pumps and various wet pumps.
• Chillers and Heat Exchangers various manufacture such as Bay Voltex, Noah,
Edwards and M&W.
Personnel Management:
• Managed construction contractors and equipment vendors during install of new
Etch equipment. This included rigging, piping, electrical and water hookup.
• As the Acting department manager we reorganized the Etch Maintenance
department to improve department performance.
• Wrote reviews, implemented corrective actions, interviewed new hires and
provided supervision for the technicians for more than ten years.
Education:
• Ricks College, now BYU Idaho (1975-76)
o Electronics Engineering
• University of Phoenix (2009-current)
o Information technology, Web Design
Factory training: LAM Rainbow 4420 basic and advanced, LAM A-6 transport module
Applied Materials Centura 2 level 1 and 2, Tegal 903e, Fusion ACU 200, Tylan Tytan furnace
systems
References:
• Please see my profile at http://www.linkedin.com/pub/doc-wirkus/9/60a/a7b
Employment Experience
Hynix Semiconductor America
Sr. Equipment Engineer LII Eugene, OR Sept. 2007 – Sept. 2008
Equipment Engineer – Supervisor Eugene, OR Apr. 1998 – Sept. 2007
Sr. Equipment Technician Eugene, OR Apr. 1997 – Apr. 1998
Zilog
Etch Equipment Technician Nampa,ID Mar. 1982 – Apr. 1997
Computer Skills Microsoft Word, Microsoft Excel, Microsoft PowerPoint, AutoCAD,
Adobe Acrobat, Photoshop, Dreamweaver, and Elements 2.0,
Learning fireworks, PHP,mySQL and Javascript.