Project Mechanical
Resume:
Fang (Annabelle) Liu
University of California at Berkeley
*******@********.***
B78, Tan Hall
Berkeley, CA 94720 USA.
Education
****-******* ************ **********, *******ity of California at
Berkeley, (supervisor: Prof. Roya Maboudian)
2005-2009 Ph.D. in Mechanical Engineering, University of California at
Berkeley, joint education project with University of Science
and Technology of China (supervisor: Prof. Roya Maboudian and
Prof. Jiaru Chu)
2001-2005 B.S. in Mechanical Engineering, University of Science and
Technology of China.
Awards
* American Vacuum Society MEMS and NEMS Best Student Paper Award, 2009
* Chinese Academy of Science Presidential Award, 2009
* Guanghua Scholarship, 2006
* Outstanding Thesis Award, University of Science and Technology of China,
2005
* Outstanding Student Award, University of Science and Technology of China,
2002-2004
Skills
1. 6+ years microfabrication process development, Microsystems design,
simulation, reliability improvement and testing experience.
2. Self-motivated, innovative problem solver, teamwork and strong writing
skills (e.g. published 14 papers)
3. Software: AutoCAD, L-edit layout tools, Cadence CAD tools, ANSYS for
MEMS multi-physics design, Matlab and Origin for data analysis,
Labtracer for test integration
4. Characterization and testing equipment: micro/nano fabrication and
testing equipments, some experience in x-ray photoelectron spectroscopy,
x-ray diffractometry, atomic force microscopy, scanning electron
microscopy, Raman spectroscopy, Auger electron spectroscopy
Project Experience
. SiC Temperature, Accelerometer, Pressure and Strain gauge Sensors for
Extreme Harsh Environments:
. Developed undoped polycrystalline 3C-SiC films with controllable
stress and strain gradient at reduced deposition temperature (800 C)
for MEMS surface coating and sealing applications.
. Investigated in-situ n-type doping of poly-SiC films and tailored the
mechanical and electrical properties simultaneously for MEMS structure
layer applications.
. Developed a low thermal budget and simple way to tailor the residual
stress and to improve the corrosion resistance of poly-SiC thin films.
. Siemens Corporate Research, Inc. SiC Metallization Project:
. Developed a process to lower the ohmic contact resistivity and enhance
the stability of Pt contacts to polycrystalline 3C-SiC operated at
elevated temperatures.
. DARPA Science & Technology Center (CIEMS) Project:
. Investigated the effect of SiC film stress on anodic oxidation during
MEMS operation
. Studied poly-Si electrode reliability in high relative humidity
environment and effectively prevented corrosion by surface
modification methods.
. Responsible for the design and testing of microinstruments for micro-
scale tribology studies, including 2-axis cantilevers for in situ wear
studies and double clamped beams for interfacial adhesion studies.
. Chip-Scale Mechanical Spectrum Analyzers Project:
. Developing processes to enhance the quality factor of poly-SiC based
high frequency resonator.
. Gas Sensing using Metal-functionalized Carbon-based Devices Project:
. Responsible for design and integrate a gas sensor based on graphene,
modified with noble metal nanoparticles
Peer Reviewed Publications
1. F. Liu, B. Hsia, C. Carraro, A. P. Pisano, and R. Maboudian, "Enhanced
Ohmic Contact to Polycrystalline Silicon Carbide via Nanocrystalline
Graphitic Carbon Interfacial Layer", submitted.
2. F. Liu, C. H. Li, C. Carraro, A. P. Pisano, and R. Maboudian, "Low-
energy Ion Bombardment to Tailor the Interfacial and Mechanical
Properties of Polycrystalline 3C-silicon Carbide", J. of Vac. & Tech.
A, in press.
3. F. Liu, C. S. Roper, J. Chu, C. Carraro, and R. Maboudian, "Corrosion
Mechanism and Surface Passivation Strategies of Polycrystalline Silicon
Electrodes", Sensors and Actuators A, in press.
4. F. Liu, C. Carraro, A. P. Pisano, and R. Maboudian, "Growth and
Characterization of Nitrogen-doped Polycrystalline 3C-SiC Thin Films for
Harsh Environment MEMS Applications", J. Micromech. Microeng. 20 (2010)
035011.
5. F. Liu, B. Hsia, D. G. Senesky, C. Carraro, A. P. Pisano, and R.
Maboudian, "Ohmic Contact with Enhanced Stability to Polycrystalline
Silicon Carbide via Carbon Interfacial Layer", Proc. of Solid-State
Sensors, Actuators, and Microsystems Workshop Hilton Head Island, South
Carolina, June 6-10, 2010, pp.214-217.
6. G. H. Li, I. Laboriante, F. Liu, et al., "Measurement of Adhesion Forces
between Polycrystalline Silicon Surfaces via A MEMS Double-clamped Beam
Test Structure", J. Micromech. Microeng. 20 (2010) 095015.
7. G. Doerk, G. Lestari, F. Liu, C. Carraro, and R. Maboudian, "Ex situ
Vapor Phase Doping of Silicon Nanowires using BBr3", Nanoscale 2 (2010)
1165-1170.
8. F. Liu, I. Laboriante, B. Bush, C. S. Roper, C. Carraro, and R.
Maboudian, "In situ Studies of Interfacial Contact Evolution via A Two-
axis Deflecting Cantilever Microinstrument", Applied Physics Letters 95
(2009) 131902.
9. F. Liu, C. Carraro, and R. Maboudian, "Residual Stress Characterization
of Polycrystalline 3C-SiC films on Si(100) Deposited from Methylsilane",
Journal of Applied Physics 106 (2009) 013505.
10. F. Liu, C.S. Roper, I. Laboriante, B. Bush, J.R. Chu, C. Carraro, and
R. Maboudian, "Anodic Oxidation of Polycrystalline 3C-silicon Carbide
Thin Films during MEMS Operation", J. Micromech. Microeng. 19 (2009)
035024.
11. F. Liu, C. S. Roper, C. Carraro, and R. Maboudian, "Effect of Electrode
Geometry and Surface Passivation on Corrosion of Polycrystalline Silicon
Under High Relative Humidity and Bias", Proc. 22nd IEEE Intl. Conf. on
Micro Electro Mechanical Systems, Sorrento, Italy, January 25-29, 2009,
pp. 611-614.
12. F. Liu, I. Laboriante, B. Bush, C. S. Roper, C. Carraro, and R.
Maboudian, "2-axis MEMS Deflecting Cantilever Microinstrument for in-
situ Reliability Studies"", Proc. 15th International Conference on Solid-
State Sensors, Actuators and Microsystems, Denver, Colorado, June 21-25,
2009, pp.1521-1524.
13. Y. Wu, S. Liu, F. Liu, and J. Chu, "Microactuators of Deformable Mirror
Using PZT Thin Film", Nanotechnology and Precision Engineering 6 (2008)
142.
14. F. Liu, G. Zhao, Y. Wu, and J. Chu, "Fabrication of AFM Probe Tip Based
on Self-sharpening Effect", Micromachining Technology 6 (2006) 39.
Affiliations
American Vacuum Society
Berkeley Sensor & Actuator Center (BSAC)
Center on Interfacial Engineering for Microelectromechanical Systems
(CIEMS)
Center of Integrated Nanomechanical Systems (COINS)
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