Electrical Engineer Project

SANDRA LEE, PhD

**** ******* **, ***** *****, California 95054

Alternate address: 318 Bay Road, North Easton, MA 02356

Cell: 510-***-**** ? Email: ********@*****.*** ? US citizen

* ******* ** QUALIFICATIONS

Technical Expert: device fabrication process development, data analysis,

root cause analysis, execution efficiency improvements, and technical

advising for current and next generation process development in

semiconductor applications

Advanced Expertise in Project Planning: Experience with leading dozens of

projects, from technical scope definition, design of experiment, experiment

execution, to communicating final reports

Communication Expert: Extensive experience with technical presentations of

complex ideas to various levels of internal and external audiences

Ph.D. in Chemical Physics from University of Illinois - Urbana-Champaign

2 WORK EXPERIENCE

1

2 LAM RESEARCH CORPORATION

2 4650 Cushing Parkway; Fremont, CA 94538

SENIOR PROCESS ENGINEER

February 2006 to Present

FEOL Conductor Logic

Technical Accomplishments:

Expert in semiconductor and dielectric material reactive ion etch (also wet

etch, deposition, and sputtering) to fabricate integrated circuit devices;

owning dozens of development and demonstration projects for 65, 45, 32, 22

and 14nm node applications, including advanced 3D topography

Served as technical lead or in-depth expert consultant for specialized

applications, often invited to functional meetings to help identify root

causes and provide recommendations for mitigation

Performed independent research and development of design of experiment

(DOE), root cause analysis, creative experimental methods, approaches and

techniques for world-class nanoscale applications resulting in successfully

resolving dozens of customer development issues

Developed novel measurement methods and techniques to improve data

confidence and determine trends, reducing resource needs to 1/3 to

confidently identify and solve customer issues

Modeled and characterized novel thin film materials for next generation

film evaluation

Awarded Best of Breed in open competition by achieving best technical

results in all categories for 32nm advanced silicon etch application,

resulting in significant validation of company capability and successful

defense of market share

Developed algorithms to optimize wafer to wafer reliability using the

interaction of periodic nanoarrays with the broadband light to improve

performance by up to 10%

Expert in semiconductor metrology and characterization techniques,

including top-down CDSEM, thin-film ellipsometry, interfermetery, optical

scatterometry, cross-sectional scanning electron microscopy, and others

Experience with SPC guidelines and database establishment

1

2 Project Planning Accomplishments:

Planned and administered various development projects including preparation

and definition of project scope, resource allocation, schedules, risks and

mitigation plans for any anticipated problems as project owner for dozens

of product demos

Owner of development of new internal wafer; coordinated between outside

vendor and internally to determine the requisite features and quality for

various needs across multiple functional groups resulting in specification,

evaluation, documentation, and establishment of new resource for critical

future development needs

Clarified and resolved customer issues, for example: defined project scope

and ultimately improved customer yield by developing processes which

reduced non-uniformity by up to 75% while maintaining other customer

requirements

Served on committee to develop and implement solutions for technical and

administrative conflicts between organizations, which required compromise

on both sides in order to implement a new workflow system to improve lab

efficiency

4 Communication Accomplishments:

Regularly communicated complex ideas to various levels of audiences,

internal and external, such as weekly customer conference calls to define

project specifications, communicate key learnings and customer

recommendations, and update project status

Authored technical presentations and documents for internal and external

audiences, some of which were showcased by management as examples for

junior engineers to follow

Trained and mentored other engineers with best known methods and technical

techniques

Documented and published multiple process reports for company reference

library

3 UNIVERSITY OF ILLINOIS

600 S. Matthews Ave; Urbana, IL 61801

RESEARCH ASSISTANT December 2000 to October 2005

Department of Chemical Sciences

Accomplishments:

Co-organized a three-day student symposium at the 2006 American Chemical

Society National Meeting; main responsibilities included solicitation and

management of funding with a budget of over $45,000

Designed, built, aligned, optimized, repaired and maintained commercial and

novel experimental optical systems, including various laser, vacuum, and

sensor detection systems

Used spectroscopic techniques to quantify and calculate the effects of the

interaction of electromagnetic radiation on matter (laser-excitation of

vacuum jet-cooled molecular thiophosgene)

Analyzed and modeled large data sets, extracting patterns and relevant

information while optimizing the S/N ratio

Wrote Fortran programs to mathematically model and analyze data sets to

predict experimental results and used LabView to create custom data

acquisition programs

Assisted in-house electrical engineer to design and create custom timing

box with micro- and nanosecond adjustable delay outputs

Administrated lab equipment and resources

1 COMPUTER SKILLS

? Proficient in Windows, Macintosh, and Unix environments

? Microsoft Office (Word, Excel, Powerpoint)

? Igor ? Origin ? PCI ? Maple ? FreeHand

? LabView ? Fortran, C, and Latex programming languages

2 RECENT TRAINING COURSES

Lam Research Corporation Courses taken include:

Introduction to Project Planning (2009)

Problem Solving and Decision Making (2009)

Statistics for Engineers (2009)

3 EDUCATION

PHD in CHEMICAL PHYSICS

UNIVERSITY OF ILLINOIS -URBANA-CHAMPAIGN December 2005

Urbana, IL

GPA: 3.66 Semester Hours: 184

BA in CHEMISTRY, minor in PHYSICS (cum laude with distinction in Chemistry)

UNIVERSITY OF PENNSYLVANIA May 2000

Philadelphia, Pennsylvania

GPA: 3.44 Semester Hours: 44 units (1 unit = 1 course)

4 Honors and Awards

Lam Research "Above and Beyond" Award for exceptional technical

performance, and appreciation for teamwork twice (2008, 2010, 2011)

Univ. of Illinois Graduate College Conference Travel Grant (March 12, 2003)

Walter Burrows Brown Fellowship in Chemical Research (Fall 2001- Spring

2002)

Graduate Assistance in Areas of National Need (GAANN) Fellowship (Spring

2001)

Recognized as Excellent Teaching Assistant, rated at least 3.5 out of 4

(Spring 2001)

American Institute of Chemists Medal Award 2000 (May 22, 2000)

5 Publications

P. D. Chowdary, B. Strickler, S. Lee and M. Gruebele, The A-X SEP spectrum

of jet-cooled thiophosgene, Chem. Phys. Lett. 434, 182-187 (2007).

S. Lee, M. Engel and M. Gruebele, The state space model of vibrational

energy flow: an experimental test using SEP spectra of jet-cooled

thiophosgene, Chem. Phys. Lett. 420, 151-156 (2006).

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