Mechanical Engineer

Tony Kroeker, P.E.

*** ******** **

Georgetown, Texas 78628

Phone 512-***-****

E-mail ***********@*****.***

Professional experience

**** - ******* *** ******** ******, Texas

Design Engineer

Design, prototyping and testing of high vacuum robotic semiconductor wafer handling system.

Completely new automated robotic wafer handling system to accommodate change from 200mm to 300mm silicon wafers.

Design of “2300” cluster tool wafer handling platform for etch chambers (Patent US6244811). This is the current etch chamber platform.

Design of slot valve for “2300” cluster tool platform (Patent US6390448 and US6095741). This the current valve used on etch chambers.

Design of chambers for high pressure super-critical carbon dioxide processing of semiconductor wafers (Patent US7445015 and US7682462).

1996 - 1998 Applied Materials Austin, Texas

Design Engineer

Design of high vacuum robotic semiconductor wafer handling systems

1982 - 1996 IBM Austin, Texas

Automation Engineer

Design of automated robotic assembly and test equipment for IBM printers and portable computers.

Design of automated robotic assembly and test equipment for client products. Clients included Ford Motor Co. and Cargill.

Design of automated robotic equipment used to handle hazardous materials for Lawrence Livermore National Labs. Automated robotic systems to process and reclaim hazardous materials. Q security clearance with the Department of Energy (DOE).

1980 - 1982 Hart Graphics Austin, Texas

Maintenance Engineer

Responsible for maintenance and Modification of printing equipment

Patents

US7682462 Cluster tool process chamber having integrated high pressure and vacuum chambers

US7445015 Cluster tool process chamber having integrated high pressure and vacuum chambers

US5235740 Press with pin detection for interference connectors

US6494670 Three chamber load lock apparatus

US6601824 Single shaft, dual cradle vacuum slot valve

US6390448 Single shaft dual cradle vacuum slot valve

US6719516 Single wafer load lock with internal wafer transport

US6244811 Atmospheric wafer transfer module with nest for wafer transport robot

US6095741 Dual sided slot valve and method for implementing the same

US6056504 Adjustable frog-leg robot

US6000227 Wafer cooling in a transfer chamber of a vacuum processing system

US5961269 Three chamber load lock apparatus

US5955858 Mechanically clamping robot wrist

US5789878 Dual plane robot

US6222337 Mechanically clamping robot wrist

US6057662 Single motor control for substrate handler in processing system

US6494670 Three chamber load lock apparatus

US6250869 Three chamber load lock apparatus

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