Engineer Field Service
Resume:
Peter A. Frisella
Peabody, MA *****
***********@*****.***
EMPLOYMENT HISTORY
**** ** ******* - ******* ********** - Cambridge, MA
Lab Engineer - Fabricate and perform experiments on devices including solar cells and MEMS devices for DNA sequencing. Equipment used includes spin coaters, diffusion furnace, RTA, chemical benches, PECVD, RIE, four- point-probe, ellipsometer, surface profiler, SEM, AFM, dicer, evaporator and PVD (sputterer). Responsible for maintenance, repair and modification of materials processing equipment including spin coater, evaporator, ALD, FIB, SEM, dicer, and plasma cleaner. Solidworks experience.
1997 to 2009 - Axcelis Technologies Inc. - Beverly, MA
Senior Process Engineer - Performed process engineering for Rapid Thermal Processing (RTP) and Ultraviolet (UV) Exposure product lines. Tasks included equipment and process characterization. Co-author of several papers on ultra-shallow-junction (USJ) formation. Participated in domestic and international visits to customers for marketing purposes. Assisted with RTP/UV hardware development and troubleshooting as needed. Responsible for metrology equipment characterization and application
Process Engineer - RTP process engineer. Characterization and application of RTP system
Patent: Method for in-situ uniformity optimization in a rapid thermal processing system (7,205,231)
1992 to 1997 - Applied Science & Technology (ASTEX) Inc. (now p/o MKS Instruments)- Woburn, MA
Manufacturing Engineer - Control and optimization of ozone generator manufacturing process.
Group Leader - Responsible for manufacturing of microwave plasma applicator components and DLC (diamond- like-carbon) CVD systems.
Service Engineer - Installation, maintenance and repair of microwave plasma components and systems. Process development.
1988 to 1992 - Lam Research Corp. - Franklin, MA
Regional Field Service Manager - Responsible for maintenance and repair of plasma etch systems in eastern U.S.
Field Service Engineer - Installation, repair and maintenance of plasma etch systems
1987 to 1988 - Intel Corp. - Jerusalem, Israel
Equipment Engineer (contract) - Installation, repair and maintenance of plasma etch systems.
1985 to 1987 - E.T. Systems (Electrotech) - Santa Clara, CA
Field Service Engineer - Installation, maintenance and repair of plasma CVD and etch systems. Some work on PVD (sputtering) systems. Process development.
1982 to 1985 - Intel Corp. - Aloha, Oregon
Line Maintenance Technician - Installation, maintenance and repair of a wide array of equipment including; plasma etch and strip systems; diffusion/CVD furnaces; photolithography steppers; resist/develop track systems; inspection systems; wet benches.
EDUCATION
1980 to 1982 - Chemeketa Community College - Salem, OR
Associate of Science in Electro-Mechanical Technology
2002 to 2007 - University of Massachussetts at Lowell - Lowell, MA
Completed ~50% of coursework for BS in Mechanical Engineering Technology
2012 – Harvard University Extension School – Cambridge, MA
Courses in MEMs
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