Mechanical Control

Matteo Rinaldi

Department of Electrical and Computer Engineering Northeastern University

*** ********** ***., ******, ************* 02115

Mobile: +1-215-***-**** E-mail: abqaqp@r.postjobfree.com, abqaqp@r.postjobfree.com

Web: http://www.northeastern.edu/nemslab

EDUCATION

Ph.D. in Electrical and Systems Engineering, December 2010.

University of Pennsylvania, Philadelphia, PA, USA.

Dissertation: Piezoelectric Aluminum Nitride Nano Plate Resonant Sensors for Next Generation

Miniaturized Sensing Platforms.

Committee: Prof. Gianluca Piazza (academic advisor), Prof. Nader Engheta (University of

Pennsylvania), Prof. Sunil Bhave (Cornell University), Prof. Jan Van der Spiegel (University of

Pennsylvania), Prof. Cherie R. Kagan (University of Pennsylvania).

Second Level Laurea Degree (M.Sc.) in Electronic Engineering, May 2007.

University of Rome Tor Vergata, Rome, Italy.

Dissertation: Micromachined Hydrogen sensors based on the variation of Work Function and

interface circuits.

Advisor: Prof. Arnaldo D Amico

Graduated cum laude

First Level Laurea Degree (B.Sc.) in Electronic Engineering, October 2004.

University of Rome Tor Vergata, Rome, Italy.

Dissertation: Fabrication and characterization of Carbon Nanotube based poly(1,8-dan) and

poly(orto-anisidina) nanocomposed films for Organic Electronic Devices.

Advisor: Prof. Aldo Di Carlo

Graduated cum laude

PROFESSIONAL EXPERIENCE

Assistant Professor in the Department of Electrical and Computer Engineering.

Northeastern University, Boston, MA, USA, January 2012-present.

Research interests: Micro/Nano Electro Mechanical Systems (MEMS/NEMS) devices with

particular emphasis on piezoelectric NEMS sensors for physical, chemical and biological

detection, Radio Frequency MEMS/NEMS devices, MEMS/NEMS based oscillators and

advanced timing solutions, micro/nano fabrication techniques and integration of MEMS/NEMS

devices with electronics.

Postdoctoral Researcher in Prof. Gianluca Piazza s Group (PMaNS Lab).

University of Pennsylvania, Philadelphia, PA, USA, December 2010-December 2011.

Worked on the development of PiezoElectric Non-Linear Nanomechanical Temperature and

Acceleration Insensitive Clocks (PENNTAC) Dynamics Enabled Frequency Sources (DEFYS)

DARPA program.

Matteo Rinaldi Page 2

Demonstrated AlN MEMS based oscillators operating at 1 GHz with extended dynamic

range (up to 6 dBm driving power) and unprecedented phase noise performance

(-90 dBc/Hz at 1 kHz offset and -170 dBc/Hz phase noise floor).

Demonstrated 1 GHz oscillators based on temperature compensated AlN MEMS

resonators (temperature coefficient of frequency, TCF, ~ 3 ppm/K) with extended

dynamic range and low phase noise performance (-85 dBc/Hz at 1 kHz offset and

-170 dBc/Hz phase noise floor).

Demonstrated an innovative and high performance micro-ovenized MEMS resonator

technology based on an AlN resonant plate and a suspended thin-film micro-heater

separated by a sub-micron air gap (only 3 mW are necessary to operate the AlN resonator

at ~100 C. Thermal time constant is in the order of 100s of s).

Demonstrated the highest frequency (970 MHz) and best performance ever reported

oscillator based on a micro-ovenized MEMS resonator technology (measured phase noise

of -85 dBc/Hz at 1 kHz offset and -170 dBc/Hz floor while operating the AlN resonator

at ~100 C).

Graduate Research Fellow in Prof. Gianluca Piazza s Group (PMaNS Lab).

University of Pennsylvania, Philadelphia, PA, USA, July 2007-December 2010.

Developed an innovative gravimetric sensor technology called AlN Nano Plate Resonant Sensor

(NCMR funded project):

Fabricated Nanoelectromechanical (NEMS) resonant sensors with frequencies of

operation ranging between 100 MHz and 10 GHz.

Demonstrated large scale integration of nano-biocoating layers, such as Single Wall

Carbon Nanotubes (SWNTs), ssDNA functionalized SWNTs and thiol-terminated ss-

DNA, with the NEMS resonant sensors.

Demonstrated arrays of NEMS resonant sensors functionalized with ss-DNA and

connected to chip-based, low power, self-sustaining multiplexed oscillator (fabricated in

the ON Semiconductor 0.5 m CMOS process) for direct frequency read-out.

Demonstrated capability to selectively detect concentrations of explosive and toxic agent

vapors in the part per trillion (ppt) range.

Selected as finalist of the 2010 PennVention Competition and writing a business plan for

SmartSense a start-up company aiming to bring to market highly differentiated sensor

solutions, based on Aluminum Nitride Nano Plate Resonant Sensor (NPR-S) (proprietary

technology - US patent application), for homeland security and proteomics analysis

applications.

Graduate Research Fellow in Prof. A. D Amico s Group (Sensors and Microsystems Lab).

University of Rome Tor Vergata, Rome, Italy, May 2006-June 2007.

Micromachined Hydrogen Sensors:

Fabricated capacitive hydrogen sensors based on the variation of work function.

Designed and prototyped low-noise read-out circuit for a micromachined Kelvin Probe

based sensor.

Matteo Rinaldi Page 3

Undergraduate Research Assistant in Prof. A. Di Carlo s Group (OptoLab).

University of Rome Tor Vergata, Rome, Italy, March 2004-October 2004.

Fabricates and carachterized carbon nanotube based nanocomposed polymers for organic thin

film transistors (OTFT).

HONORS AND AWARDS

- Elected member of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society

Administrative Committee (AdCom) 1 January 2013 31 December 2015.

- DARPA Young Faculty Award Class of 2012 (2012).

- IEEE International Frequency Control Symposium 2011 Best Student Paper Award (2011).

The S. J. Stein Prize Awarded for the superior achievements in the field of new or unique

-

materials or applications for materials in electronics (2011).

- IEEE International Ultrasonics Symposium 2010 nominated for Best Student Paper Award

(2010).

- Weiss Tech House Innovation Fund as student inventor of SmartSense technology (2010).

- IEEE International Frequency Control Symposium 2009 Best Student Paper Award (2009).

- IEEE International Frequency Control Symposium 2008 nominated for Best Student Paper

Award (2008).

Sebastiano and Rita Raeli Award ( 5,000), after M.Sc. graduation Awarded for the

-

excellence in the average mark (2007).

Accenture S.p.A. Best Thesis Dissertation Award ( 2,500), with the (M.Sc.) dissertation:

-

Micromachined Hydrogen sensors based on the variation of Work Function and interface

circuits, (2007).

Micron Technology Foundation Inc. Biannual Research Fellowship ( 4,000), for study in

-

the Sensor and Microsystems Group at the University of Rome Tor Vergata (2006-2007).

Didactic assistance part-time internship at the Engineering School of the University of

-

Rome Tor Vergata, awarded for the excellence in class grades (2002-2006).

- University of Rome Tor Vergata Tuition Free Scholarship, awarded for the excellence in

class grades (2002-2006).

RESEACRH GRANTS AND FUNDING

External Funding as a PI:

1. DARPA-YFA-N66001-12-1-4221, "Young Faculty Award": Un-cooled Nanomechanical

Infrared/THz Detectors Based on Piezoelectric Resonant Nano Plates", $300,000.

STUDENT TRAINING

PhD STUDENTS

Yu Hui (Summer 2012 start)

Matteo Rinaldi Page 4

MASTER STUDENTS

Zhenyun Qian (Summer 2012 start)

Raul Vyas (Summer 2012 start)

Giovanni Lanzilli (co-examiner)

M.Sc. (laurea degree) in EE, University of Rome Tor Vergata, October 2011

Thesis: The AlN Nano Plate NEMS Resonant Sensor Technology: Experimental

Characterization and Functionalization Using Metalloporphyrins.

OTHER GRADUATE STUDENT DEFENSE COMMITTEES:

Thaddaeus Webster, Ph.D., Northeastern University, ChE (October 2012)

Ufuk Muncuk, MS., Northeastern University, ECE (June 2012)

TEACHING EXPERIENCE

Northeastern University, Boston, MA, USA.

- Microelectromechanical Systems, EECE 7244, Fall 2012.

- Micro and Nano Fabrication, EECE 5606, Spring 2012.

University of Pennsylvania, Philadelphia, PA, USA.

- Special Guest Lecturer, ESE 529 RF MEMS (graduate), Fall 2010.

- Teaching Assistant, ESE 218 Physics and Models of Semiconductor Devices

(undergraduate), Spring 2009.

- Teaching Assistant, ESE 529 RF MEMS (graduate), Fall 2008.

- Supervisor of several undergraduate and graduate research projects, 2007-2011.

RELEVANT TALKS

T1. High Frequency AlN MEMS Resonators with Integrated Nano Hot Plate for Temperature

Controlled Operation, IEEE International Frequency Control Symposium (IFCS)

2012, Baltimore, USA, May 23rd, 2012

T2. The Aluminum Nitride Nano Plate Resonant Sensor Technology for Chemical, Physical

and Biological Detection. University of Rome Tor Vergata EE Department, Rome,

Italy, December 19th 2011 [Invited Seminar].

T3. Piezoelectric Aluminum Nitride Nano Plate Resonant Devices for Next Generation

Miniaturized Sensing Platforms, Northeastern University ECE Department, Boston,

MA, USA, April 12th 2011 [Invited Seminar].

T4. Use of a Single Multiplexed CMOS Oscillator As Direct Frequency Read-Out for an Array

of Eight AlN Contour-Mode NEMS Resonant Sensors, IEEE Sensors Conference 2010,

Waikoloa, Hawaii, USA, 1-4 November 2010.

Matteo Rinaldi Page 5

T5. Reconfigurable 4-Frequency CMOS Oscillator Based on AlN Conotur-Mode

MEMS Resonators, IEEE International Ultrasonics Symposium 2010, San Diego, USA,

11-14 October 2010 [Nominated for the Best Student Paper Award].

T6. SS-DNA Functionalized Ultra-Thin-Film AlN Contour-Mode Resonators with Self-

Sustained Oscillator for Volatile Organic Chemical Detection, 23rd IEEE Conference on

Micro Electro Mechanical Systems (MEMS 2010), Hong Kong SAR, China, January 26,

2010.

T7. Ultra-Thin-Film AlN Contour-Mode Resonators for Sensing Applications, IEEE

International Ultrasonics Symposium 2009, Rome, Italy, September 22, 2009.

T8. AlN Contour-Mode Resonators for Narrow-Band Filters above 3 GHz, IEEE

International Frequency Control Symposium 2009, Besancon, France, April 22, 2009

[Winner of the Best Student Paper Award].

T9. Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN Contour-

Mode MEMS Resonators, IEEE International Frequency Control Symposium 2008,

Honolulu, Hawaii, USA, May 20, 2008 [Nominated for the Best Student Paper Award].

PUBLICATIONS

BOOK CHAPTERS

B1. M. Rinaldi, "NEMS Resonant Chemical Sensors", in Encyclopedia of Nanotechnology,

Springer, 2012, in press (invited contribution).

PEER-REVIEWED JOURNAL PAPERS

J1. A. Tazzoli, M. Rinaldi, G. Piazza, "Experimental Investigation of Thermally Induced

Non-Linearities in Aluminum Nitride Contour Mode MEMS Resonators", IEEE

Electron Device Letters, pp. 724-726, 2012.

J2. M. Rinaldi, C. Zuo, J. Van der Spiegel and G. Piazza, "Reconfigurable CMOS Oscillator

based on Multi-Frequency AlN Contour-Mode MEMS Resonators ", IEEE Transactions

on Electron Devices, vol. 58, issue 5, pp. 1281-1286, 2011.

J3. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "Super High Frequency Two-Port AlN

Contour-Mode Resonators for RF Applications", IEEE Transactions on Ultrasonics,

Ferroelectrics, and Frequency Control, vol. 57, n. 1, pp. 38-45, 2010. [A combination of

Figure 4 and Figure 9 of this manuscript appears as cover image of the January 2010

issue of IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control].

Matteo Rinaldi Page 6

J4. C. Zuniga*, M. Rinaldi*, S. M. Khamis, A. T. Johnson, and G. Piazza, "Nanoenabled

Microelectromechanical Sensor for Volatile Organic Chemical Detection", Applied

Physics Letters, vol. 94, 223122, 2009. *First Author. [This manuscript was selected for

the Virtual Journal of Nanoscale Science & Technology -- June 22, 2009, Volume 19,

Issue 25 and for the Virtual Journal of Biological Physics Research -- June 15, 2009,

Volume 17 Issue 12].

PEER-REVIEWED CONFERENCE PROCEEDING PAPERS

C1. Y. Hui and M. Rinaldi, " Ultra-Fast and High Resolution NEMS Thermal Detector

Based on a Nano-Air-Gap Piezoelectric Resonant Structure", Proceedings of the IEEE

Sensors 2012 Conference, Taipei, Taiwan, 28-31 October 2012, in press [Late News

Paper].

C2. A. Tazzoli, N. Kuo, M. Rinaldi, H. Pak, D. Fry, D. Bail, D. Stevens, and G. Piazza, "A

586 MHz Microcontroller Compensated MEMS Oscillator based on Ovenized Aluminum

Nitride Contour-Mode Resonators", Proceedings of the IEEE International Ultrasonics

Symposium (IUS) 2012, Dresden, Germany, 7-10 October 2012, in press.

C3. M. Rinaldi, A. Tazzoli, C. Zuniga, G. Piazza, "970 MHz Ovenized Oscillator Based on

an ALN MEMS Resonator with Monolithically Integrated Suspended Nano Hot Plate",

Proceedings of the 2012 Solid-State Sensors, Actuators and Microsystems

Workshop (Hilton Head 2012), Hilton Head Island, 3-7 June 2012, pp. 347-350.

C4. C. Zuniga, M. Rinaldi, A. Tazzoli, G. Piazza, "Single Transistor Oscillator Based on

Piezoelectric Resonant Nanochannel for Operation in Liquids", Proceedings of the 2012

Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2012), Hilton

Head Island, 3-7 June 2012, 367-370.

C5. M. Rinaldi, Y. Hui, C. Zuniga, A. Tazzoli, G. Piazza, "High Frequency AlN MEMS

Resonators with Integrated Nano Hot Plate for Temperature Controlled Operation",

Proceedings of the IEEE International Frequency Control Symposium (IFCS) 2012,

Baltimore, USA, May 21-24, 2012, pp. 1-5.

C6. A. Tazzoli, M. Rinaldi, G. Piazza, "Ultra High Frequency Temperature Compensated

Oscillators Based on Ovenized AlN Contour-Mode MEMS Resonators", Proceedings of

the IEEE International Frequency Control Symposium (IFCS) 2012, Baltimore, USA, May

21-24, 2012, pp. 1-5.

C7. A. Tazzoli, G. Piazza, M. Rinaldi, J. Segovia, C. Cassella, B. Otis, J. Shi, K. Turner, C.

Burgner, K. McNaul, D. Bail, and V. Felmetsger, "Piezoelectric Nonlinear

Nanomechanical Temperature and Acceleration Insensitive Clocks", Proceeding of

SPIE 8373, 83730A, Baltimore, USA, April 23, 2012.

Matteo Rinaldi Page 7

C8. M. Rinaldi, A. Tazzoli, J. Segovia-Fernandez, V. Felmetsger and G. Piazza, "High Power

and Low Temperature Coefficient of Frequency Oscillator Based on a Fully Anchored

and Oxide Compensated AlN Contour-Mode MEMS Resonator", Proceedings of the

25th IEEE Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France,

29 January 2 February 2012, pp. 696-699.

C9. A. Tazzoli*, M. Rinaldi*, G. Piazza, "Ovenized High Frequency Oscillators Based on

Aluminum Nitride Contour-Mode MEMS Resonators", Proceedings of the IEEE

International Electron Devices Meeting (IEDM) 2011, Washington, USA, December 5-7,

2011, pp. 20.2.1-20.2.4.. *First Author.

C10. A. Tazzoli*, M. Rinaldi*, C. Zuo, N. Sinha, J. Van der Spiegel, G. Piazza*, "Aluminum

Nitride Reconfigurable RF-MEMS Front-Ends", Proceedings of the IEEE 9th

International Conference on ASIC (ASICON 2011), Xiamen, China, October 25-28, 2011,

pp. 1046-1049 [invited paper]. *First Author.

C11. J. Segovia-Fernandez, A. Tazzoli, M. Rinaldi, and G. Piazza, "Nonlinear Lumped

Electrical Model for Contour Mode AlN Resonators", Proceedings of the IEEE

International Ultrasonics Symposium (IUS) 2011, Orlando, USA, 18-21 October 2011, in

press.

C12. M. Rinaldi and G. Piazza, " Effects of Volume and Frequency Scaling in AlN Contour

Mode NEMS Resonators on Oscillator Phase Noise", Proceedings of the IEEE

International Frequency Control Symposium 2011, San Francisco, USA, 1-5 May 2011,

pp. 1-5, [Winner of the Best Student Paper Award].

C13. M. Rinaldi, C. Zuniga and G. Piazza, "ss-DNA Functionalized Array of AlN Contour-

Mode NEMS Resonant Sensors with Single CMOS Multiplexed Oscillator for sub-ppb

Detection of Volatile Organic Chemicals ", Proceedings of the 24th IEEE Conference on

Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico, 23-27 January 2011,

pp. 976-979.

C14. C. Zuniga, M. Rinaldi and G. Piazza, " Reduced Viscous Damping in High Frequency

Piezoelectric Resonant Nanochannels for Sensing in Fluids", Proceedings of the 24th

IEEE Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico,

23-27 January 2011, pp. 960-963.

C15. M. Rinaldi, C. Zuniga, B. Duick, and G. Piazza, "Use of a Single Multiplexed CMOS

Oscillator As Direct Frequency Read-Out for an Array of Eight AlN Contour-Mode

NEMS Resonant Sensors", Proceedings of the IEEE Sensors Conference 2010, Waikoloa,

Hawaii, USA, 1-4 November 2010, pp. 2666-2670.

C16. C. Zuniga, M. Rinaldi, and G. Piazza, "High Frequency Piezoelectric Resonant

Nanochannel for Bio-Sensing Applications in Liquid Environment", Proceedings of the

IEEE Sensors Conference 2010, Waikoloa, Hawaii, USA, 1-4 November 2010, pp. 52-55.

Matteo Rinaldi Page 8

C17. G. Piazza, M. Rinaldi, C. Zuniga, " Nanoscaled Piezoelectric Aluminum Nitride

Contour-Mode Resonant Sensors ", Proceedings of the IEEE Sensors Conference 2010,

Waikoloa, Hawaii, USA, 1-4 November 2010, pp. 2202-2207 [invited paper].

C18. M. Rinaldi, C. Zuo, J. Van der Spiegel and G. Piazza, "Reconfigurable 4-Frequency

CMOS Oscillator Based on AlN Contour-Mode MEMS Resonators", Proceedings of

the IEEE International Ultrasonics Symposium 2010, San Diego, USA, 11-14 October

2010, in press [nominated for Best Student Paper Award].

C19. M. Rinaldi, C. Zuniga, C. Zuo and G. Piazza, "GHz Range Nanoscaled AlN Contour-

Mode Resonant Sensors (CMR-S) with Self-Sustained CMOS Oscillator", Proceedings

of the Solid-State Sensors, Actuators and Microsystems Workshop (Hilton Head 2010),

Hilton Head Island, 06-10 June 2010, pp. 471-474.

C20. M. Rinaldi, B. Duick, C. Zuniga, C. Zuo and G. Piazza, "ss-DNA Functionalized Ultra-

Thin-Film AlN Contour-Mode Resonators with Self-Sustained Oscillator for Volatile

Organic Chemical Detection", Proceedings of the 23rd IEEE Conference on Micro

Electro Mechanical Systems (MEMS 2010), Hong Kong SAR, China, 24-28 January 2010,

pp. 132-135.

C21. M. Rinaldi, C. Zuniga and G. Piazza, "Ultra-Thin-Film AlN Contour-Mode Resonators

for Sensing Applications", Proceedings of the IEEE International Ultrasonics

Symposium 2009, Rome, Italy, 20-23 September 2009, pp. 714-717.

C22. C. Zuniga, M. Rinaldi and G. Piazza, "Quality Factor of MEMS and NEMS AlN

Contour-Mode Resonators in Liquid Media", Proceedings of the IEEE

International Ultrasonics Symposium 2009, Rome, Italy, 20-23 September 2009, pp. 2568-

2571.

C23. C. Zuo, M. Rinaldi and G. Piazza, "Power Handling and Related Frequency Scaling

Advantages in Piezoelectric AlN Contour-Mode MEMS Resonators", Proceedings of

the IEEE International Ultrasonics Symposium 2009, Rome, Italy, 20-23 September 2009,

pp. 1187-1190.

C24. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "AlN Contour-Mode Resonators for

Narrow-Band Filters above 3 GHz", Proceedings of the IEEE International Frequency

Control Symposium 2009, Besancon, France, 20-24 April 2009, pg. 70-74 [Winner of the

Best Student Paper Award].

C25. M. Rinaldi, C. Zuniga, C. Zuo, and G. Piazza, "Ultra-Thin Super High Frequency two-

port AlN Contour-Mode Resonators and Filters", Proceedings of the 15th International

Conference on Solid-State Sensors, Actuators and Microsystems (Tranducers 2009),

Denver, Colorado, USA, 21-25 June 2009, pg. 577-580.

Matteo Rinaldi Page 9

C26. M. Rinaldi, C. Zuniga, and G. Piazza, "5-10 GHz AlN Contour-Mode

Nanoelectromechanical Resonators", Proceedings of the 22nd IEEE Conference on

Micro Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, 24-28 January 2009, pg.

916-919.

C27. C. Zuniga, M. Rinaldi, S. M. Khamis, T. S. Jones, A. T. Johnson, and G. Piazza, "DNA-

Decorated Carbon Nanotubes as Sensitive Layer for AlN Contour-Mode Resonant-

MEMS Gravimetric Sensor", Proceedings of the 22nd IEEE Conference on Micro

Electro Mechanical Systems (MEMS 2009), Sorrento, Italy, 24-28 January 2009, pg. 320-

323.

C28. M. Rinaldi, C. Zuniga, N. Sinha, M. Taheri, S. M. Khamis, A. T. Johnson, and G. Piazza,

"Gravimetric Chemical Sensor Based on the Direct Integration of SWNTs on AlN

Contour-Mode MEMS Resonators", Proceedings of the IEEE International Frequency

Control Symposium 2008, Honolulu, Hawaii, USA, 18-21 May 2008, pg, 443-448

[nominated for Best Student Paper Award].

THESIS DISSERTATIONS

D1. M. Rinaldi, "Piezoelectric Aluminum Nitride Nano Plate Resonant Sensors for Next

Generation Miniaturized Sensing Platforms", Ph.D. thesis dissertation in Electrical and

Systems Engineering, University of Pennsylvania, Philadelphia, USA, December 2010.

D2. M. Rinaldi, "Micromachined Hydrogen sensors based on the variation of Work Function

and interface circuits", Second Level Laurea (M.Sc.) thesis dissertation in Electronic

Engineering, University of Rome Tor Vergata, Rome, Italy, May 2007.

D3. M. Rinaldi, "Fabrication and characterization of Carbon Nanotube based poly(1,8-dan)

and poly(orto-anisidina) nanocomposed films for Organic Electronic Devices", First Level

Laurea (B.Sc.) thesis dissertation in Electronic Engineering, University of Rome Tor

Vergata, Rome, Italy, October 2004.

PATENTS

P1. G. Piazza, A. T. Johnson, M. Rinaldi, C. Zuniga, "System and Method for Detecting a

Gaseous Analyte in a Gas", United States Patent Application 201********, publication

date: 07/29/2010, application number: 12/693046.

C. Zuniga, M. Rinaldi, G. Piazza, Piezoelectric Gravimetric Label-Free Sensor, United

P2.

States Non-Provisional Patent Application 61408847, filed in November 2011.

A. Tazzoli, M. Rinaldi, G. Piazza, Ovenized High Frequency Oscillators Based on AlN

P3.

Contour-Mode MEMS Resonators, United States Provisional Patent Application

61505182, filed in July 2011.

Matteo Rinaldi Page 10

M. Rinaldi, Y. Hui, Ovenized Piezoelectric Resonators with Monotonically Integrated

P4.

Suspended Heater, Northeastern University Disclosure of invention, filed in April 2012.

MICRO/NANO FABRICATION SKILLS

Skilled user of many micro/nano fabrication tools including: Elionix ELS-7500EX e-beam

lithography tool, Stepper Nikon G4, Mask aligner Karl Suss MA4, Tegal AMS 2004 SMT AlN

reactive sputtering tool, Atomic Layer Deposition Cambridge Nanotech Savannah 200, ICP

Trion Phantom III, XeF2 etcher Xactix Xetch e1, Wire Bonder KNS 4253, FEI Strata DB235

Focused Ion Beam, DI Dimension 3000 Atomic Force Microscope.

Served as tool guru (super-user in charge of new users training) of different tools in the Wolf

Nanofabrication Facility at the University of Pennsylvania, including: XeF2 etcher Xactix Xetch

e1, Wire Bonder KNS 4253, Stress measurement Tencor FCX-2320 and The Explorer-14 Denton

Vacuum Sputterer.

PROFESSIONAL AFFILIATIONS

- Institute of Electrical and Electronics Engineering (IEEE), Student Member 2008-2010,

Member 2011-present.

- IEEE Ultrasonics, Ferroelectrics and Frequency Control Society (UFFC), Student Member

2009-2010, Member 2011-present.

- IEEE Electron Devices Society (EDS), Student Member 2009-2010, Member 2011-present.

- SPIE International Society for Optics and Photonics, Member 2012-present.

REVIEWER FOR INTERNATIONAL CONFERENCES

- Elected member of the IEEE Ultrasonics, Ferroelectrics, and Frequency Control Society

Administrative Committee (AdCom) 1 January 2013 31 December 2015.

- 2012 IEEE-AESS International Conference on Space and Satellite Telecommunications

(ESTEL 2012), Rome, Italy, October 2-5 2012 Technical Program Committee (TPC)

Member

- 2010 IEEE International Symposium on Circuits and Systems (ISCAS 2010), Paris,

France, May 30th June 2nd 2010

- 2009 IEEE International Symposium on Circuits and Systems (ISCAS 2009), Taipei,

Taiwan, May 24th 27th 2009

ACTIVE PEER REVIEWER

- IEEE Transactions on Electron Devices

- IEEE Electron Device Letters

- IEEE Transactions on Ultrasonic Ferroelectrics and Frequency Control

- IEEE/ASME Journal of Microelectromechanical Systems

- Journal of Micromechanics and Microengineering

- IEEE Sensors Journal

Matteo Rinaldi Page 11

- Sensors & Actuators: B. Chemical

- IEEE Antennas and Wireless Propagation Letters

ADDITIONAL INFORMATION

Nationality: Italian

Current US Immigration Status: H-1B Visa.

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