Philip D. Rack

*** ********* *********** ********

Department of Materials Sciece and Engineering

University of Tennessee

Knoxville, TN 37996-2200

Tel:865-***-****

Email: abp914@r.postjobfree.com

EDUCATION

May 1997 Ph.D. Materials Science and Engineering, University of Florida, Gainesville, FL.

Dissertation: Optical Transitions in Alkaline Earth Sulfide Electroluminescent Phosphors

Advisor: Dr. Paul H. Holloway (GPA: 3.95/4.0)

June 1993 B.Sc. Materials Science and Engineering, Georgia Institute of Technology, Atlanta,

GA. (GPA: 3.4/4.0)

PROFESSIONAL EXPERIENCE

8/05-present Associate Professor

8/01-8/05 Assistant Professor

Department of Materials Science and Engineering, The University of Tennessee, Knoxville, TN

Research areas include electronic and optoelectronic materials, thin film processing and

characterization, nanofabrication, combinatorial thin film synthesis.

Teaching Experience

Courses

1. MSE 201 Introduction to Materials Science and Engineering

2. MSE 300 Materials Laboratory Procedures

3. MSE 630 Thin Film Materials Processing

9/98-8/01 Assistant Professor, Department of Microelectronic Engineering, Rochester Institute

of Technology, Rochester, NY

Research areas include luminescent materials, thin film processing, thin film

characterization, and masking materials for optical lithography.

Teaching Experience

Courses

1. EMCR 713 Electronic Properties of Materials

2. EMCR 221 Introduction to Microlithography (and laboratory)

3. EMCR 643/703 Thin Film Processes (and laboratory)

4. EMCR 632/702 Silicon Processes Laboratory (fabricate a vertical npn bipolar transistor)

Integrated Circuit Process Engineering Short Course

1. Bipolar and MOS Processing

2. Chemical Vapor Deposition

3. Physical Vapor Deposition

4. Wet and Dry Etching

5. Microlithography

6. Copper Chemical Mechanical Polishing (CMP)

9/98-8/01 Advisory Scientist, Advanced Vision Technologies, Inc. 150 Lucius Gordon Drive

Suite 215, West Henrietta, NY

6/97-9/98 Senior Research and Development Engineer, Advanced Vision Technologies, Inc.

150 Lucius Gordon Drive Suite 215, West Henrietta, NY

Developed a high resolution field emission display. Responsibilities included thin film

materials research (luminescent materials and field emitter materials), and semiconductor

device process development.

8/93-5/97 Graduate Research Assistant (Dr. Paul H. Holloway - advisor), Materials Science

and Engineering, University of Florida, Gainesville, FL

* Investigated rare earth and excitonic optical transitions in wide band gap semiconductors.

Investigated valence band and density of states of ZnS, SrS, and CaxSr1-xGa2S4 phosphors

with XPS to understand high field transport and tunnel injection phenomenon.

Investigated electron injection layers in thin film electroluminescent devices to enhance

tunnel emission from interface states.

Investigated the negative ion re-sputtering (NIR) phenomenon in rf magnetron sputter

deposited phosphor films.

1994 (summer) Graduate Student Intern (Dr. Sey-Shing Sun - supervisor), Planar Systems

Inc., Beaverton, OR

Deposited and evaluated thin film electroluminescent phosphors. Responsibilities included

complete device fabrication and subsequent optical and electrical characterization.

AWARDS AND HONORS

2007 University of Tennessee College of Engineering Research Fellow Award

2006 University of Tennessee College of Engineering Research Fellow Award

2005 Best Poster Award: Microscopy and Microanalysis National Meeting

2005 Best Poster Award: National Materials Research Society Spring Meeting

2003 Ralph E. Powe Junior Faculty Achievement Award

2003 University of Tennessee College of Engineering Outstanding Young Faculty Award

2002 Georgia Institute of Technology Council of Outstanding Young Engineering Alumni

1997 AVS National Graduate Research Award

1995 MRS National Graduate Student Award

1997 AVS Graduate Student Poster Award

1995 AVS Graduate Student Poster Award

1993 Graduated Magna Cum Laude in Materials Science and Engineering, GIT

PROFESSIONAL INTERESTS

Nanofabrication and materials integration for advanced device applications

Electrical and optical phenomena in semiconductors

Electron Solid Interactions

Combinatorial thin film sythesis for rapid materials discovery

Materials characterization (XPS, AES, PL, SIMS, XRD, AFM, SEM)

PUBLICATIONS

Invited Book Chapters

1. Philip D. Rack, Andrew J. Steckl and Jason C. Heikenfeld, Inorganic Electroluminescent

Displays, The Handbook of Luminescence and Display Materials and Devices Edited by

B.R. Vaddi and H.S. Nalwa, American Scientific Publishers (2003).

2. James M. Fitz-Gerald, Philip D. Rack, Bradly Ringeisen, Daniel Young, Rohit Modi, Ray

Auyeung, Huey-Daw Wu, Matrix Assisted Pulsed Laser Evaporation Direct Write (MAPLE

DW): A new Method to Rapidly Prototype Organic and Inorganic Materials, Direct Write

Technologies for Rapid Prototyping Applications of Sensors, Electronics, and Integrated

Power Sources, Edited by Alberto Piqu and Douglas B. Chrisey, Academic Press (2002).

Invited Review Articles (refereed)

1. Steven J. Randolph, Jason D. Fowlkes, Philip D. Rack, Focused, Nanoscale Electron-Beam-

Induced Deposition and Etching, Critical Reviews of Solid State and Materials Sciences,

Vol. 31, p. 55-89 (October 2006)

2. Philip D. Rack and Paul H. Holloway, The Structure, Device Physics, and Materials

Properties of Thin Film Electroluminescent Displays, Materials Science and Engineering

Reports Volume R21, p171-220 (Jan. 1998).

3. Philip D. Rack, Ananth Naman, Paul H. Holloway, Sey-Shing Sun, Richard T. Tuenge,

Materials Used in Electroluminescent Displays, MRS Bulletin vol. 21 no. 3 p. 49-58 (March

1996).

Refereed Journal Articles

1. Yingfeng Guan, Y.F. Guan Anatoli V. Melechko, Anthony J. Pedraza, Michael L. Simpson,

Philip D. Rack, Non-Lithographic Organization of Nickel Catalyst for Carbon Nanofiber

Synthesis on Laser-Induced Periodic Surface Structures, Nanotechnology (Submitted 5/07).

2. A.V. Melechko, K.L. Klein, J.D. Fowlkes, D. K. Hensley, I. A. Merkulov, T. E. McKnight,

P.D. Rack, J. A. Horton, M. L. Simpson, Control of carbon nanostructure: from nanofiber

toward nanotube and back, Journal of Applied Physics, (submitted 3/07).

3. Yingfeng Guan, Philip D. Rack, Xingwu Wang, Yuandan Liu, Michael D. Potter, Korey D.

Sorge, Combinatorial synthesis and characterization of magnetic FexAl1-xN thin films for

biomedical applications, Thin Solid Films (Submitted 3/07).

4. Steven J. Randolph, Jason D. Fowlkes, Philip D. Rack, Single- and bi-layer

nanolithography approaches utilizing electron-beam-induced deposition, Journal of Vacuum

Science and Technology B, Microelectronics and Nanometer Structures (submittted 5/06)

5. Yuepeng Deng, Yinfeng Guan, Jason D. Fowlkes, S.Q. Wen, George M. Pharr, Fengxiao

Liu, Peter K. Liaw, C.T. Liu, Philip D. Rack, A combinatorial thin film sputtering approach

for synthesizing and characterizing ternary ZrCuAl metallic glasses, Intermetallics (in

press).

6. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D.

Rack, Electrical characterization of amorphous silicon thin film transistors fabricated by rf

magnetron sputtering with substrate bias, Microelectronic Engineering (submitted 6/06).

7. F. X. Liu, P. K. Liaw, W. H. Jiang, C. L. Chiang, Y. F. Gao, Y. F. Guan, J. P. Chu, and P. D.

Rack, Fatigue-Resistance Enhancements by Glass-Forming Metallic Films, Materials

Science and Engineering A (In press).

8. Daryl A. Smith, Jason D. Fowlkes, Philip D. Rack, A Nanoscale Three Dimensional

Monte Carlo Simulation of Electron Beam Induced Deposition with Gas Dynamics,

Nanotechnology Nanotechnology Vol. 18, No. 26 265308 pp. 1-14 (July 2007).

9. Chang K. Choi, Anthony E. English, Seung-Ik Jun, Kenneth D. Kihm, and Philip D. Rack,

An endothelial cell compatible biosensor fabricated using optically thin indium tin oxide

silicon nitride electrodes, Biosensors and Bioelectronics Vol. 22, No. 11, 15, pp. 2585-2590

(May 2007).

10. J.D. Fowlkes, P.D. Rack, J.M. Fitz-Gerald, Ultraviolet emitting (Y1-xGdx)2O3-z thin films

deposited by rf magnetron sputtering: structure property thin film processing

relationships, Thin Solid Films, Vol. 515 no. (7-8) pp. 3488-3498 (February 2007).

11. T. Leventouri, A. V. Melechko, K. D. Sorge, K. L. Klein, J. D. Fowlkes, P. D. Rack, I. M.

Anderson, J. R. Thompson, T. E. McKnight, M. L. Simpson, Magnetic Alloys in Nanoscale

Biomaterials, Trans Met A, 37A, 3423-3427 (December 2006).

12. Yuepeng Deng, Y. Guan, Philip D. Rack, Combinatorial Synthesis and Parameter

Optimization of Chromium-doped Yttrium Aluminum Garnet Thin Film Sputtering, Thin

Solid Films, Vol. 515, no. 4, 5 pp. 1721-1726 (Dec 2006).

13. Young R. Choi, Philip D. Rack, Steven J. Randolph, Daryl A. Smith, and David C. Joy,

Pressure effect of growing with electron beam induced deposition with WF6 and TEOS

precursor, Scanning, Vol. 28 no. 6, pp. 3111-318, (December 2006) *image selected for

journal cover.

14. Yuepeng Deng, Jason D. Fowlkes, Philip D. Rack, James M. Fitz-Gerald, Thin Film rf

Magnetron Sputtering of Gadolinium Doped Yttrium Aluminum Garnet Ultraviolet Emitting

Materials, Journal of Optical Materials Vol. 29 pp.183-191 (November 2006).

15. Manjeet S. Dhindsa, Neil R. Smith, and Jason Heikenfeld, Philip D. Rack, Jason D.

Fowlkes, Mitchel J. Doktycz, Anatoli V. Melechko, and Micheal. L. Simpson,

Electrostatically Induced Wetting of Vertically Aligned Superhydrophobic Carbon

Nanofibers, Langmuir Vol 22 no. 21, pp. 9030-9034, (October 2006).

16. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D.

Rack, Low Temperature Solid Phase Crystallization of Amorphous Si Thin Films Deposited

with RF Magnetron Sputter Deposition with Substrate Bias, Applied Physics Letters Vol 89,

no. 2, p 22104-1-3 (July 2006).

17. F.X. Liu, P.K. Liaw, G.Y. Wang, C.L. Chiang, D.A. Smith, P.D. Rack, J.P. Chu and R.A.

Buchanan, Specimen-geometry effects on mechanical behavior of metallic glasses,

Intermetallics, Vol. 14, no. 8-9, pp. 1014-1018 (August-September 2006).

18. J.D. Fowlkes, P.D. Rack, J.M. Fitz-Gerald, Ultraviolet emitting (Y1-xGdx)2O3-z thin films

deposited by rf magnetron sputtering: Combinatorial modeling, synthesis, and rapid

characterization, Thin Solid Films, Vol. 510, no. 1-2, pp. 68-76 (July 2006).

19. J.D. Fowlkes, A.V. Melechko, K.L Klein, P.D. Rack, D.A. Smith, D.K. Hensley, M.J.

Doktycz, M.L. Simpson, Control of catalyst particle crystallographic orientation in

vertically aligned carbon nanofiber synthesis, Carbon, Vol 44 no. 8, pp. 1503-1510 (July

2006).

20. K.L. Klein, A.V. Melechko, P.D. Rack, D.K. Hensley, J.D. Fowlkes, H.M. Meyer III, L.F.

Allard, T.E. McKnight, M.L. Simpson, Formation of Ultrasharp Vertically Aligned Cu-Si

Nanocones by a DC Plasma Process, Journal of Physical Chemistry B: Condensed Matter,

Materials, Surfaces, Interfaces & Biophysical Vol 110 no. (10) pp. 4766-4771 (March 2006).

21. J.D. Fowlkes, S.J. Randolph, P.D. Rack, Growth and Simulation of High Aspect Ratio

Nanopillars by Primary and Secondary Electron Induced Deposition Journal of Vacuum

Science and Technology B, Microelectronics and Nanometer Structures, Vol 23, no 6, pp

2825-2832 (November/December 2005).

22. E.D. Specht, P.D. Rack, A. Rar, G.M. Pharr, E.P. George, J.D. Fowlkes, H. Hong, and E.

Karapetrova, Metastable Phase Evolution and Grain Growth in Annealed Nanocrystalline

Cr-Fe-Ni Films, Thin Solid Films, Vol. 493, Iss. 1-2, pp. 307-312 (December 2005).

23. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D.

Rack, DC substrate bias effects on amorphous silicon sputter deposited films and integration

and characterization of a sputter deposited thin film transistor array, Applied Physics

Letters Vol. 87, No. 13, pp. 132108-1-3 (September 2005).

24. K. L. Klein, A. V. Melechko, P. D. Rack, J.D. Fowlkes, H. M. Meyer, and M. L. Simpson,

Cu-Ni composition gradient for the catalytic synthesis of vertically aligned carbon

nanofibers, Carbon Vol. 43, Iss. 9, pp. 1857-1863 (August 2005) *image selected for journal

cover.

25. S.J. Randolph, J.D. Fowlkes, P.D. Rack Focused electron beam-induced etching of silicon

dioxide, Journal of Applied Physics Vol. 98 034902 pp. 1-6 (August 2005).

26. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D.

Rack Characterization of reactively sputtered silicon dioxide thin films for fully sputtered

metal-insulator-semiconductor switching devices, Electronics Letters, Vol 41, Iss. 14, No.

07, pp. 59 60 (July 2005)

27. S.J. Randolph, J.D. Fowlkes, P.D. Rack Effects of heat generation during electron beam

induced deposition of nanostructures, Journal of Applied Physics, Vol. 97 124312 pp. 1-8

(June 2005).

28. X. Yang, S.J. Randolph, P.D. Rack, L.R. Baylor, H. Cui, W.L. Gardner, and M.L. Simpson,

Integrated tungsten nanofiber field emission cathodes selectively grown by nanoscale

electron beam-induced deposition, Applied Physics Letters Vol 86 No. 18 pp. 183106 1-3

(May 2005).

29. D.S Lee, A.J. Steckl, P.D. Rack, J.M. Fitz-Gerald, Cathodoluminescence and its

Temperature Dependence in Tm-doped AlxGa1-xN Thin Films, Physica Status Solidi (c) Vol 2

No. 7 pp. 2765-2769 (May 2005).

30. Seung-Ik Jun, Philip D. Rack, Timothy E. Mcknight and Michael L. Simpson, A statistical

parameter study of ITO (indium tin oxide) thin films deposited by RF sputtering, Thin Solid

Films Vol 476 No. 1 pp. 59-64 (April 2005).

31. Steven J. Randolph, Mark D. Hale, Michael A. Guillorn, Michael L. Simpson, Philip D.

Rack, In-Situ Micro Vacuum-Encapsulation Process for a Carbon Nanofiber-Based Field

Emission Diode, Microelectronic Engineering, Vol. 77 pp. 412-419 (April 2005).

32. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D.

Rack, Electrical and microstructural characterization of molybenum tungsten electrodes

using a combinatorial thin film sputtering technique, Journal of Applied Physics Vol. 97

059046 pp. 1-6 (March 2005).

33. Yuepeng Deng, Jason D. Fowlkes, James M. Fitz-Gerald, Philip D. Rack, Combinatorial

Thin Film Synthesis of Gd-doped Y3Al5O12 Ultraviolet Emitting Materials, Applied Physics

A. 80 no. 4, pp. 787-789 (February 2005).

34. A. Rar, J. Frafjord, Jason D. Fowlkes, E. D. Specht, P. D. Rack, M. L. Santella, E.P. George,

and G. M. Pharr, PVD Synthesis and High-Throughput Property Characterization of Ni- Fe-

Cr Alloy Libraries, Journal of Measurement Science & Technology, Vol 16, pp. 46-53

(January 2005).

35. L.R. Baylor, W.L. Gardner, X. Yang, R.J. Kasica, M.A. Guillorn, B. Blalock, D.K. Hensley,

S. Islam, D.H. Lowndes, A.V. Melechko, V.I. Merkulov, D.C. Joy, P. D. Rack, M.L.

Simpson, D. K. Thomas, Initial Lithography Results from the Digital Electrostatic e-beam

Array Lithography (DEAL) Concept, Journal of Vacuum Science and Technology B, vol. 22

no. (6) pp. 3021-3024 (Nov/Dec 2004).

36. J.M Fitz-Gerald, J. Hoekstra, J.D. Fowlkes, P.D. Rack, Pulsed Laser Deposited Ultraviolet

Emitting SrS:Te Thin Films, Applied Physics Letters vol. 82, no.20, pp. 3466-3468 (May

2003).

37. Philip D. Rack, Steven Randolph, Yuepeng Deng, Jason Fowlkes, Young Choi and David C.

Joy, Nanonscale Electron Beam Stimulated Processing, vol. 82, no.14, pp. 2326-2328 (April

2003). (*also selected for publication in the April 14, 2003 issue of the Virtual Journal of

Nanoscale Science & Technology).

38. Philip D. Rack, Matthew Lassiter, Anatoli Bourov, Dennis Baiko, and Bruce Smith,

Optical Properties of Thin Film CrxNy-CrOxNy Multilayer Films for 157nm Optical

Lithography Journal of Vacuum Science and Techology B, vol. 21 no. (2) pp. 814-817

(March/April 2003).

39. Yong Eui Lee, David P. Norton, John D. Budai, Philip D. Rack, Jeffrey Peterson, and

Michael D. Potter, Improvement of Photo- and Low-Voltage Cathodoluminescence in

Lithium Zinc Gallate Blue and Green Thin-Film Phosphors, Journal of Applied Physics vol.

91, no. 5, p. 2974-2977 (March 2002).

40. Philip D. Rack, Jeffrey J. Peterson, Michael D. Potter, Wounjhang Park, Eu+3 and Cr+3

Doping for Red Cathodoluminescence in ZnGa2O4, Journal of Materials Research vol.16,

no.5 p. 1429-33 (May 2001).

41. Philip D. Rack, Jeffrey J. Petterson, Jie Li, H.J. Rack, A.G. Geiculescu, Thin Film Growth

of Reactive Sputter Deposited Tungsten-Carbon Thin Films, Journal of Vacuum Science and

Technology A, vol.19, no.1 p. 62-65 (January 2001).

42. Caroline A. Kondoleon, Philip D. Rack, Eric Lambers, Paul Holloway, Carbon Deposition

During Electron Beam Degradation of Ta2Zn3O8 Thin Film Phosphors, Journal of Vacuum

Science and Technology A, vol.18, no.6 p. 2699-2705 (Nov. 2000).

43. Yong Eui Lee, David P. Norton, John D. Budai, Philip D. Rack, and Michael D. Potter,

Photo- and Cathodoluminescence Characteristics of Blue Light Emitting Epitaxial Sr2CeO4

Thin Film Phosphors, Applied Physics Letters, Volume 77, No. 5, p678-680 (Aug 2000).

44. Santosh K. Kurinec, Philip D. Rack, Michael D. Potter, Thomas N. Blanton, Unit Cell

Indexing of Luminescent Tantalum Zinc Oxide, Journal of Materials Research Volume 15

No. 6, p1320-1323 (June 2000).

45. J.M. Fitzgerald, P.D. Rack, R.C.Y. Auyeung, A. Pique, M Zeleznik, and D.B. Chrisey,

Novel Laser Direct Writing of Phosphor Screens for High Definition Flat Panel Displays,

Applied Physics Letters Volume 76 (11), p1386-1388 (March 2000).

46. Ted A Obrien, Philip D. Rack, Paul H. Holloway and Michael C. Zerner, Semiempirical Self

Consistent Field Modeling of Ce+3 4f and 5d Energy Levels in Oxygen-doped Ca0.5Sr0.5

Ga2S4, Journal of the Electrochemical Society, Volume 147 (2) p792-795 (Feb. 2000).

47. Philip D. Rack, Ted A O Brien, Michael C. Zerner, Paul H. Holloway, Determination of the

Ce+3 bonding in the Ca0.5Sr0.5Ga2S4:Ce Phosphor Via X-ray Photoelectron Spectroscopy,

Journal of Applied Physics, Volume 86, No. 5, p2377-2384 (Sept. 1, 1999).

48. Philip D. Rack, Michael D. Potter, Andrew Woodard and Santosh Kurinec, Negative Ion Re-

sputtering in Ta2Zn3O8 Thin Films, Journal of Vacuum Science and Technology A, Volume

17 Issue 5, p2805-2810 (Sept. 1999).

49. J. M. Fitzgerald, P. D. Rack, Troy A. Trottier, M. Ollinger, S. J. Pennycook, H. Gao, and R.

K. Singh, Novel Synthesis of Spherical Luminescent Particulate Coatings, Journal of Applied

Physics Communications, Volume 86 No. 3, p1759-1761 (Aug. 1, 1999).

50. Philip D. Rack, Michael D. Potter, Santosh Kurinec, Wounjhang Park, Brent K. Wagner,

John Penczek, and Christopher J. Summers, Luminescence Properties of Ta2Zn3O8 and Mn-

Doped Ta2Zn3O8, Journal of Applied Physics, Volume 84 No. 8, p4466-4470 (Oct. 15, 1998).

51. Philip D. Rack, Paul H. Holloway, Won Park, Brent K. Wagner, and Christopher J.

Summers, Bound Exciton Luminescence in Te-Doped SrS, Journal of Applied Physics

Volume 84 No. 7, p3676-3683 (Oct 1, 1998).

52. Jay S. Lewis, Philip D. Rack, Paul H. Holloway, Photoluminescence and Thermal

Quenching of Bound Excitons in (BaS)1-x(SrTe)x, Journal of Crystal Growth, Volume

184/185, p1175-1179 (Feb. 1998).

53. Ted A O Brien, Philip D. Rack, Paul H. Holloway, and Michael C. Zerner, Crystal Field

and Molecular Orbital Calculations of the Optical Transitions in Ce Doped Alkaline Earth

Sulfide (MgS, CaS, SrS, and BaS) Phosphors, Journal of Luminescence, Volume 78, p245-

257 (June 1998).

54. Victor Sosa, Philip D. Rack, and Paul H. Holloway, X-ray Photoelectron Spectroscopy

Valence Band Data for ZnS, SrS, and Sr0.45,Ca0.55Ga2S4:Ce Luminescent Thin Films, Journal

of Vacuum Science and Technology A, Volume 18, No. 2, p393-396 (Mar/Apr 1998).

55. Mark R. Davidson, Balu Pathangey, Paul H. Holloway, Philip D. Rack, S.-S. Sun C.N.

King, Sputter Deposition of Phosphors for Electroluminescent Flat Panel Displays, Journal

of Electronic Materials Volume 26 No.11 p.1355-1360 (Dec. 1997).

56. W.L. Warren, K. Vanheusden, M.A. Rodriquez, C.H. Seager, D.R. Tallant, P. Rack, P.H.

Holloway, B. Wagner, C.J. Summers, P.N.Yocom, Luminescence, Absorption, and Site

Symmetry of Ce Activated SrGa2S4 Phosphors, Applied Physics Letters, vol. 70 no.4 p. 478-

480 (Jan. 1997).

57. Philip D. Rack, Paul Holloway and Sey-Shing Sun, Variations in the Ce Radiative

Transition by Oxygen Doping in the Ca0.55Sr0.45Ga2S4:Ce Blue Electroluminescent Phosphor,

Society for Information Display Journal Vol. 4 No. 4 p. 281-286 (Nov. 1996).

Refereed Conference Proceedings

1. Daryl A. Smith, Jason D. Fowlkes, Ted A. Liang, Philip D. Rack, Understanding the growth

mechanisms of electron beam induced deposition via a Monte Carlo based, 3D growth

simulation, 2006 6th IEEE Conference on Nanotechnology Proceedings.

2. Manjeet S. Dhindsa, Neil R. Smith, and Jason Heikenfeld, Philip D. Rack, Jason D.

Fowlkes, Mitchel J. Doktycz, Anatoli V. Melechko, and Micheal. L. Simpson,

Electrostatically Induced Wetting of Vertically Aligned Superhydrophobic Carbon

Nanofibers, 2006 6th IEEE Conference on Nanotechnology Proceedings.

3. Th. Leventouri, A. V. Melechko, K. D. Sorge, K. L. Klein, J. D. Fowlkes, P. D. Rack, I. M.

Anderson, J. R. Thompson, T. E. McKnight, M. L. Simpson, Magnetic Alloys in Nanoscale

Biomaterials Proceedings of the Fourth International Alloys Conference (2005).

4. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D.

Rack Fabrication and characterization of an active matrix thin film transistor array for

intracellular probing Proceedings of the Materials Research Society Spring Meeting, Vol

873-E pp. 9.21.1-6 (2005).

5. T.E. Mcknight, A.V. Melechko, G.D. Griffin, S-I. Jun, P.D. Rack, M.A. Guillorn, V.I.

Merkelov, M.L. Simpson, Optically and Electrically Adressed Carbon Nanofiber Electrode

Arrays for Intracellular Interfacing, SPIE Proceedings 5588: Smart Medical and Biomedical

Sensor Technology II, p. 128-135 (2004).

6. E.D. Specht, P.D. Rack, G.M. Pharr, E.P. George, H. Hong, Nonequilibrium Structures in

Co-deposited Cr-Fe-Ni Films, Proceedings of the Combinatorial and Artificial Intelligence

Methods in Materials Science II Symposium Vol. 804, pp. 45-50 (2004).

7. D.S Lee,. A.J. Steckl, U. Hommerich, E.E. Nyein, P.D. Rack, J. Fitzgerald, J.M. Zavada,

Enhanced Blue Emission From Tm-doped AlxGa1-xN Electroluminescent Thin Films

International Semiconductor Device Research Symposium IEEE, No.03EX741 p.5-6 (2003).

8. Jason D. Fowlkes, Philip D. Rack, Raj Bansal, James M. Fitz-Gerald, Cathodoluminescence

Study of Gadolinium Doped Yttrium Oxide Thin Films Deposited By Radio Frequency

Magnetron Sputtering, Proceedings of the New Applications for Wide Bandgap

Semiconductors Symposium of the Materials Research Society Spring Meeting, Vol. 764,

C7.12 (2003).

9. James M. Fitz-Gerald, Jeff Hoekstra, Raj Bansal, Jason D. Fowlkes, Philip D. Rack,

Temperature Dependent Cathodoluminescence Characterization of Ultraviolet Emitting

Films Grown by Pulsed Laser Deposition, Proceedings of the Advanced Optical Processing

of Materials Symposium of the Materials Research Society Spring Meeting Volume 780, p.

15-20 (2003).

10. Philip D. Rack, Alexander Thesen, Stephen Randolph, Jason Fowlkes, David C. Joy, Soft

Electron Beam Etching for Precision TEM Sample Preparation, SPIE Microlithography

2003: Metrology, Inspection, and Process Control for Microlithography XVII, Volume 5038

paper #113 (August 2003).

11. James M. Fitz-Gerald, Jeffrey G. Hoekstra, Jason D. Fowlkes, Philip D Rack, Ultraviolet

Emitting SrS:Te Thin Films, MRS Proceedings of the Progress in Semiconductor Materials II

- Electronic and Optoelectronic Applications Vol 744, p. M4.1.1-M4.1.12 (April 2003).

12. Bruce W. Smith, Geert Vandenberghe, Patrick Martin, Philip Rack, Stephen Hsu, J. Fung

Chen, James Wood, Gray Bar Masking: Fabrication and Imaging for 193nm, Proceedings of

the SPIE 21st Annual Symposium on Photomask Technology.

13. P.D. Rack, J.M. Fitz-Gerald, A.C. Geiculescu, H.J. Rack, A. Piqu, R.C.Y. Auyeung, and

D.B. Chrisey, Deposition of Ceramic Materials Using Powder and Precursor Vehicles via

Direct Write Processing, Proceedings of the Materials for Direct Write Symposium of the

Materials Research Society Spring Meeting, Volume 624, pp. 29-34 (2000).

14. Yong Eui Lee, David P. Norton, John D. Budai, Miyoung Kim, Stephen Pennycook, Philip

D. Rack, and Michael D. Potter, Epitaxial Oxide Thin Film Phosphors for Low Voltage FED

Applications, Proceedings of the Electron Emissive, Vacuum Microelectronics, and Flat

Panel Display Materials Symposium of the Materials Research Society Spring Meeting

Volume 621, p.Q2.4.1-6 (2000).

15. Philip D. Rack, Ted A O Brien, Michael C. Zerner, Paul H. Holloway, Semiempirical Self

Consistent Field Modeling of the Ce+3 4f and 5d Energy Levels in Solid State Luminescent

Materials, Proceedings of the Optical Properties of Materials Syposium at the Materials

Research Society Fall Meeting, Vol. 579 p. 221-229 (Nov. 1999).

16. Philip D. Rack, Michael D. Potter, Andrew Woodard and Santosh Kurinec, Sputtering

Luminescent Ta2Zn3O8 Thin Films, Proceedings of the Luminescent Materials Symposium of

the Materials Research Society Spring Meeting, Volume 560, eds. J. McKittrick, B. Di

Bartolo, K. Mishra, p. 75-82 (April 1999).

17. Paul H. Holloway, Sean Jones, Philip Rack, Joseph Sebastian, and Troy Trottier, Flat Panel

Displays: How Bright and Colorful is the Future?, Proceedings of the Tenth International

Symposium on the Applications of Ferroelectrics, vol. 1 p. 127-133 (August 1996).

18. Paul H. Holloway, J.-E. Yu, Philip Rack, Joseph Sebastian, Sean Jones, Troy Trottier, K.S.

Jones, B. Pathangey, T.J. Anderson, S.-S. Sun, R.T. Tuenge, E. Dickey, and C. N. King,

Blue and Yellow Light Emitting Phosphors for Thin Film Electroluminescent Displays, MRS

Proceedings Vol. 345 (1994).

Non-Refereed Conference Proceedings

1. Daryl A. Smith, Jason D. Fowlkes, Philip D. Rack, Elucidating the growth mechanisms of

electron beam induced deposition via a Monte Carlo based, 3D growth simulation,

Proceedings of the 50th International Conference on Electron, Ion, and Photon Beam

Technology and Nanofabrication (2006).

2. Steven J. Randolph, Jason D. Fowlkes, Philip D. Rack, Development of a bilayer

nanolithography scheme utilizing electron-beam-induced deposition of an ultrathin resist,

Proceedings of the 50th International Conference on Electron, Ion, and Photon Beam

Technology and Nanofabrication (2006).

3. S.J. Randolph, L.R. Baylor, K.L. Klein, W.L. Gardner, R.J. Kasica, M.A. Guillorn, D.K.

Hensley, H.M. Meyer III, S. Islam, P.D. Rack, R. Rucker, T. Rahman, T. Grundman, T.

Bigelow, S.A. Eliza, R. Vijayar, J.A. Moore, M.L. Simpson, and M.N. Ericson, Design

improvements and performance enhancement of the Digital Electrostatic electron-beam

Array Lithography (DEAL) Prototype, Proceedings of the 50th International Conference on

Electron, Ion, and Photon Beam Technology and Nanofabrication (2006). .

4. Seung-Ik Jun, Anatoli V. Melechko, Timothy E. Mcknight, Michael L. Simpson, Philip D.

Rack, Fabrication and characterization of 20 20 active addressed intra/extracellular

stimulating and recording array using thin film transistors and vertically-aligned carbon

nanofibers, Proceedings of the 49th International Conference on Electron, Ion, and Photon

Beam Technology and Nanofabrication (2005).

5. Jason D. Fowlkes, Steven J. Randolph, Philip D. Rack,Unraveling the complex variable

space of electron beam induced deposition by a Monte Carlo based, 3D growth simulation,

Proceedings of the 49th International Conference on Electron, Ion, and Photon Beam

Technology and Nanofabrication (2005).

6. L.R. Baylor, W.L. Gardner, X. Yang, R.J. Kasica, M.A. Guillorn, B. Blalock, D.K. Hensley,

S. Islam, D.H. Lowndes, A.V. Melechko, V.I. Merkulov, D.C. Joy, P. D. Rack, M.L.

Simpson, D. K. Thomas, Progress Toward Full Implementation of the Digital Electrostatic

E-beam Array Lithography (DEAL) Concept, Proceedings of the 49th International

Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication (2005).

7. K.L. Klein, A.V. Melechko, P.D. Rack, D.K. Hensley, J.D. Fowlkes, H.M. Meyer III, L.F.

Allard, T.E. McKnight, M.L. Simpson, Synthesis of Ultrasharp Vertically Aligned Copper-

Silicon Nanocones by Cu-Facilitated DC Plasma Reactive Ion Etching of Silicon Substrate,

Proceedings of the 49th International Conference on Electron, Ion, and Photon Beam

Technology and Nanofabricatio (2005).

8. D. H. Lowndes, L. R. Baylor, B. Blalock, J. B. Caughman, H. Cui, W. L. Gardner, M. A.

Guillorn, D. K. Hensley,S. Islam, D. C. Joy, R. Kasica,A. V. Melechko,V. I. Merkulov, P.D.

Rack, M. L. Simpson, J. H. Whealton, and X. Yang, Digital Electrostatic E-beam Array

Lithography (DEAL): Progress Toward Proof of Massively Parallel, Low-Energy E-beam

Lithography, Proceedings of the Advanced Lithography Program Review Microsystems

Technology OfficeDefense Advanced Research Projects Agency, Santa Fe, NM (May 5-8,

2003).

9. Philip D. Rack, David C. Joy, Phillip E. Russell, Nanoscale Electron Beam Stimulated

Processes, NSF DMII Grantees Conference Proceedings (January 2003).

10. Philip D. Rack, Jie Li, Paul Ostdiek, Jeffrey J. Peterson, Linh Li, and Terrance Rogelstad,

Materials Development and Current Transport in Vacuum Microelectronic Devices,

Proceedings of the 14th Biennial University/Government/Industry Microelectronics

Conference, p. 140-143 (June 2001).

11. Jeffrey J. Petterson, Michael D. Potter, and Philip D. Rack, Luminescence and Energy

Transfer Mechanisms in Mn+2, Cr+3, and Eu+3 Doped ZnGa2O4, Proceedings of the 6th

International Conference on the Science and Technology of Display Phosphors, p. 239-244

(Nov. 2000)

12. Jie Li, Paul Ostdiek, Michael D. Potter and Philip D. Rack, Field Emitter Material

Investigations for Vacuum Field Effect Transistors, Proceedings of the International Vacuum

Electronics Conference, p 364 (May 2000).

13. Yon Eui Lee, David P. Norton, John D. Ducai, Christopher Rouleau, Chan Park Stephen J.

Pennycook, Michael D. Potter, Philip D. Rack, Enhanced Luminescence in Epitaxial Oxide

Thin Film Phosphors, Proceedings of the Fifth International Conference on the Science and

Technology of Display Phosphors, p.109-112 (Nov. 1999).

14. Karl D. Hirschman and Philip D. Rack, Exploring Silicon Process Technology Through

RIT s NPN BJT Process, Proceedings of the 13th Biennial University/Government/Industry

Microelectronics Conference p. 94-98 (June 1999).

15. Santosh K. Kurinec, Andrew R. Woodard, Philip D. Rack and Michael D. Potter, AVT-RIT

NSF Partnership for the Development of Low Voltage Thin Film Phosphors for Field

Emission Displays, Proceedings of the 13th Biennial University/Government/Industry

Microelectronics Conference p. 73-78 (June 1999).

16. Philip D. Rack, Santosh Kurinec and Michael D. Potter, Development of a Novel Low

Voltage Display, Proceedings of the NSF Design and Manufacturing Grantees Conference

(Jan. 1999).

17. Philip D. Rack, Michael D. Potter, Santosh Kurinec, and Hung Tran, Rare Earth and

Transition Metal Doping of the Ta2Zn3O8 Phosphor for Low Voltage FED Applications,

Proceedings of the Third International Conference on the Science and Technology of Display

Phosphors, p. 267-270 (Nov. 1997).

18. Philip D. Rack, Paul H. Holloway, Ted A O Brien, and Michael C. Zerner, Crystal Field

and Semiemperical Molecular Orbital Calculations on Ce+3 Doped Alkaline Earth Sulfide

Phosphors, Proceedings of the Third International Conference on the Science and

Technology of Display Phosphors, (Nov. 1997).

19. Philip D. Rack, Paul H. Holloway, Wounjhang Park, Brent Wagner, John Penczek,

ChrisSummers, William L. Warren and Karel Vanheusden, Blue Excitonic Emission From

SrS:Te Powders, Proceedings of the Second International Conference on the Science and

Technology of Display Phosphors, p. 267-270 (Nov. 1996).

20. W.L. Warren, K. Vanheusden, M.A. Rodriquez, C.H. Seager, D.R. Tallant, J.A. Tuschman

S.D. Silliman, D.T. Brower, P. Rack, P.H. Holloway, B. Wagner, C.J. Summers,

P.N.Yocom, Local Ce Environments and Their Effects on Optical Properties of SrS and

SrGa2S4, Proceedings of the Second International Conference on the Science and Technology

of Display Phosphors, p. 127-130 (Nov. 1996).

21. Philip D. Rack, Ananth Naman, Sey-Shing Sun, Tin Nguyen, Kevin Jones, and Paul H.

Holloway, Microstructural Changes and Their Effects on the Emission Spectra in SrS:Ce

Thin Film Electroluminescent Devices, Proceedings of the 8th International Conference on

Electroluminescence, p. 355-358 (August 1996).

22. Philip D. Rack, Paul Holloway and Sey-Shing Sun, Effects of Oxygen Doping on the

Chemical State and Radiative Transition of Ce in the SrxCa1-xGa2S4:Ce Blue EL Phosphor,

Proceedings of the First International Conference on the Science and Technology of Display

Phosphors, p. 79-82 (Nov. 1995).

23. Philip D. Rack, Paul Holloway, Long Pham, John Wager, and Sey-Shing Sun, Brighter Blue

SrxCa1-xGa2S4:Ce Electroluminescent Devices with an Electron Injection Layer, Society for

Information Display Digest vol. 26 p. 480-483 (May 1995).

Patents

1. Philip D. Rack, Paul Holloway, Sey-Shing Sun, Eric R. Dickey, Christian F. Schaus,

Richard T. Tuenge, and Christopher N. King, TFEL Device with Injection Layer, US Patent #

5,581,150.

Popular Press Articles

1. J.M. Fitz-Gerald, P.D. Rack, Use of Pulsed Laser Deposition to Deposit Tellurium-Doped

Thin Films, Technical Insights Alert, Copyright 2003 Frost & Sullivan ISSN 0896-422X,

August 29, 2003.

Research Reports Submitted to Sponsors

1. Steve Allison, Al Ackerman, Philip D. Rack, UV Electroluminescent Device Development,

Final report submitted to ORNL 11/03.

2. Philip D. Rack, David C. Joy, Phillip E. Russell, Nanoscale Exploratory Research:

Nanoscale Electron Beam Stimulated Processing, Final report submitted to NSF 12/03.

3. Philip D. Rack, Ultraviolet Emitting Solid State Materials, Final report submitted to Oak

Ridge Associated Universities 4/04.

4. Philip D. Rack and David C. Joy Report on the mechanisms and kinematics of direct

deposition, and the effect of beam and sample parameters on the mechanical, electrical, and

adhesion properties of the deposited material, 2005 year end review submitted to

Semiconductor Research Corporation 12/05.

5. Philip D. Rack and David C. Joy, Electron Beam Deposition and Etching, 2005 Year end

Report submitted to Intel 1/06

RESEARCH AND SCHOLARLY PRESENTATIONS (*lead presenter was PDR or PDR

group member)

Invited

1. *Device Fabrication of Active Matrix Thin Film Transistor Array ofr Intracellular (and

Extracellular) Probing, dpix Corporation, San Jose, CA (November 22, 2006)

2. *Nanofabrication for interfacing and mimicking live cells AND Nanoscale Remanufacturing,

Society for Manufacturing Engineers -- The Next Industrial Revolution: Nanotechnology &

Manufacturing, Oak Ridge TN (August 23-24, 2006).

3. *Understanding electron-beam-induced deposition and etching via a Monte Carlo based,

3D growth simulation: Envizion, 1st International Workshop on Electron Beam Induced

Depostion, Delft, Holland (June 26-27, 2006)

4. Selective Electron Beam Erosion and Deposition of Materials, Microscopy and

Microanalysis 2005, Honolulu, HA (July 31- August 4, 2005).

5. *Electron-solid, electron-gas, and gas-solid interactions during electron microscopy and

spectroscopy: artifacts and nanoscale materials manipulation, 2004 Joint Florida Chapter

Symposium of the American Vacuum Society and the Microscopy and Microanalysis

Society, Orlando Florida (March 15, 2005)

6. Control of Nanofiber Synthesis by Catalyst Particle Crystal Structure, Orientation and

Faceting, Symposium KK: Kinetics-Driven Nanopatterning on Surfaces, Fall Materials

Research Society Conference, Boston MA (November 29-December 3 2004).

7. *Combinatorial RF Magnetron Sputtering for Rapid Materials Discovery: Methodology and

Applications, Microscopy and Microanalysis 2004, Savannah GA, (August 1-5, 2004).

8. *Focused Electron Beam Stimulated Nanoscale Direct Write, 2004 Joint Florida Chapter

Symposium of the American Vacuum Society and the Microscopy and Microanalysis

Society, Orlando Florida (March 8, 2004).

10. *Focused Electron Beam Stimulated Nanoscale Direct Write, DARPA Massively

Reconfigurable Microfabrication Tools DARPA/MTO Workshop, Napa CA (October 28-30,

2003).

12. *Focused Nanoscale Electron Stimulated Processing, KLA-Tencor, San Jose CA (October

31, 2003)

13. *Materials Research and Device Properties of Field Emission Displays, Electrical and

Computer Engineering Department, The University of Kentucky, Lexington KY (April 25,

2003)

14. Ultraviolet Emitting SrS:Te Thin Films, Symposium M: Progress in Semiconductor

Materials II - Electronic and Optoelectronic Applications, Fall Materials Research Society

Conference, Boston MA (December 3-7 2002).

15. *Field Emission Display Technology, XI International Materials Research Congress, Cancun

Mexico (August 25-29, 2002).

16. *Thin Film Processing and Materials Research for Emerging Flat Panel Display

Technologies, The Oak Ridge Chapter of ASM International January Meeting (January

2002).

17. *The Material Properties, Device Mechanisms and Thin Film Processing of a Novel Field

Emission Display, New England Chapter of the American Vacuum Society (June 2001).

18. *Thin Film Processing and Materials Research for Emerging Flat Panel Display

Technologies, The Department of Materials Science and Engineering, The University of

Tennessee (April 2001).

19. *Field Emission Display Materials and Devices, Nanoelectronics Laboratory, University of

Cincinnati, (September 2000).

20. *Thin Film Processing and Materials Research for Emerging Flat Panel Display

Technologies, Department of Materials Science and Engineering, Virginia Polytechnic

Institute and State University, (April 2000).

21. *The Material Properties and Device Mechanisms of Thin Film Electroluminescent Displays,

Nanoelectronics Laboratory, University of Cincinnati (April 2000).

22. *The Material Properties, Device Mechanisms, and Thin Film Processing of a Novel Field

Emission Display, Surface Modification Branch of the Naval Research Laboratory (Oct.

1999).

23. *Field Emission Display Materials and Devices, Imaging 99 AVS-MRS-ACS-EDS Joint

Chapter Symposium (June 1999).

24. *Flat Panel Display Technologies, 16th Annual Microelectronic Engineering Conference,

(May 1998).

25. *Materials Properties and Device Mechanisms of Thin Film Electroluminescent Displays,

17th Annual Symposium of the East Tennnessee Chapter of the Materials Research Society

(May 1997).

Contributed (*lead presenter was PDR or PDR group member)

1. O. Malkina, C. Finkel, K.D. Sorge, T. Leventouri, K.L. Klein, A.V. Melechko, J.D. Fowlkes,

P.D. Rack, and M.L. Simpson, Magnetic Properties of Fe-Co Catalysts for Carbon Nanofiber

Synthesis, American Physics Society National Meeting, Denver, Colorado (March 5-9,

2007).

2. K.D. Sorge, O. Malkina, C. Finkel, K. L. Klein, A. V. Melechko, J. D. Fowlkes, P. D. Rack,

and M. L. Simpson, Magnetic Properies of Ni Nanoparticles Used for Carbon Nanofiber

Synthesis, American Physics Society National Meeting, Denver, Colorado (March 5-9,

2007).

3. K.L. Klein, A.V. Melechko, J.D. Fowlkes, K.D. Sorge, T. Leventouri, R. Rucker, P.D. Rack

and M.L. Simpson, Evolution of Fe-Co Magnetic Alloys: from Thin Films to Catalyst

Nanoparticles for Carbon Nanofiber Synthesis. Fall Materials Research Society Meeting

(November 26-December 1, 2006).

4. *Combinatorial synthesis and characterization of magnetic FexAl1-xN thin films for

biomedical applications, 53rd International AVS Conference, San Francisco, CABoston, MA

(Nov. 13-17, 2006).

5. *The fabrication and characterization of polycrystalline silicon active layer thin film

transistor with vertically aligned carbon nanofiber, 53rd International AVS Conference, San

Francisco, CABoston, MA (Nov. 13-17, 2006).

6. *Digital Electrostatic Electron-Beam Array Lithography (DEAL) Prototype Improvements,

53rd International AVS Conference, San Francisco, CABoston, MA (Nov. 13-17, 2006).

7. *Electron-Beam Induced Etching (EBIE) for EUV Mask Repair, 53rd International AVS

Conference, San Francisco, CABoston, MA (Nov. 13-17, 2006).

8. *New Strategies for Improvement and Implementation of the Digital Electrostatic e-beam

Array Lithography (DEAL) Concept, International Vacuum Nanoelectronics Conference,

Guilin China, (July 17-20, 2006).

9. *Elucidating the growth mechanisms of electron beam induced deposition via a Monte

Carlo based, 3D growth simulation, 50th International Conference on Electron, Ion, and

Photon Beam Technology and Nanofabrication, Baltimore, MD (May30-June 2, 2006).

10. *Development of a bilayer nanolithography scheme utilizing electron-beam-induced

deposition of an ultrathin resist, 50th International Conference on Electron, Ion, and Photon

Beam Technology and Nanofabrication, Baltimore, MD (May30-June 2, 2006).

11. Design improvements and performance enhancement of the Digital Electrostatic electron-

beam Array Lithography (DEAL) Prototype, 50th International Conference on Electron, Ion,

and Photon Beam Technology and Nanofabrication, Baltimore, MD (May30-June 2, 2006).

12. *DC substrate bias effect on sputter deposited thin films and characterization of thin film

transistor fully deposited by rf magnetron sputtering, Spring Materials Research Society

Meeting, San Francisco CA (April 16-21, 2006).

13. Fe-Co magnetic alloy catalysts for the synthesis of vertically aligned carbon nanofibers,

Spring Materials Research Society Meeting, San Francisco CA (April 16-21, 2006).

14. Fatigue-Reistance Enhancements by Glass-Forming Metallic Films, TMS 2006, 135th

Annual Meeting & Exhibition, San Antonio, Texas (March 12-16, 2006).

15. *Vertically Aligned Carbon Nanofiber Array Integrated with Active-Addressed Thin Film

Transistors for Intra/Extracellular Stimulus and Measurement, 52nd International AVS

Conference, Boston, MA (Oct. 30-Nov. 4 2005).

16. *Compositional and Structural Characterization of Tungsten Nanostructures Produced by

Electron Beam-Induced Deposition, 52nd International AVS Conference, Boston, MA (Oct.

30-Nov. 4 2005).

17. Recent Lithography Results from the Digital E-beam Array Lithography (DEAL) Concept,

52nd International AVS Conference, Boston, MA (Oct. 30-Nov. 4 2005).

18. *Electron Beam Induced Processing Techniques for Advanced Lithography Mask Repair,

52nd International AVS Conference, Boston, MA (Oct. 30-Nov. 4 2005).

19. *Maskless, Direct-Write Nanolithography using Electron Beam-Induced Deposition, 52nd

International AVS Conference, Boston, MA (Oct. 30-Nov. 4 2005).

20. *Sputtering of Y3Al5O12:Cr Thin Films for Temperature Sensor Applications, 52nd

International AVS Conference, Boston, MA (Oct. 30-Nov. 4 2005).

21. *Electron Beam Induced Processing of Nanoscale Features: Process Parameters, Simulated

Growth, and Nanoscale Applications, 52nd International AVS Conference, Boston, MA (Oct.

30-Nov. 4 2005).

22. Growth Mechanisms of Electron Beam Induced Carbon Deposition Using Hydrocarbon

Contamination, Microscopy and Microanalysis 2005, Honolulu, HA (July 31- August 4,

2005).

23. Progress Toward Realization of the Digital Electrostatic e-beam Array Lithography (DEAL)

Concept, International Vacuum Nanoelectronics Conference, Oxford, UK (July 10-14, 2005).

24. Magnetic Alloys in Nanoscale Biomaterials, Fourth International Alloy Conference (IAC-4),

Kos, Greece, (June 26-July 01, 2005).

25. *Fabrication and characterization of 20 20 active addressed intra/extracellular stimulating

and recording array using thin film transistors and vertically-aligned carbon nanofibers, 49th

International Conference on Electron, Ion, and Photon Beam Technology and

Nanofabrication, Orlando, FL (June 1-4, 2005).

26. *Unraveling the complex variable space of electron beam induced deposition by a Monte

Carlo based, 3D growth simulation, 49th International Conference on Electron, Ion, and

Photon Beam Technology and Nanofabrication, Orlando, FL (June 1-4, 2005).

27. Progress Toward Full Implementation of the Digital Electrostatic E-beam Array Lithography

(DEAL) Concept, 49th International Conference on Electron, Ion, and Photon Beam

Technology and Nanofabrication, Orlando, FL (June 1-4, 2005).

28. Synthesis of Ultrasharp Vertically Aligned Copper-Silicon Nanocones by Cu-Facilitated DC

Plasma Reactive Ion Etching of Silicon Substrate, 49th International Conference on Electron,

Ion, and Photon Beam Technology and Nanofabrication, Orlando, FL (June 1-4, 2005).

29. Effect of Hydrogen on the Mechanical Properteis of Zirconium alloys, NSF-Europe Grantees

Meeting and Forum on Europe-USA Collaboration in Materials Research, Strasbourg

Germany (May 30 - 31, 2005).

30. *Thin film synthesis of BMG alloys for coatings and combinatorial alloy design, BMG-IV

(The fourth International Bulk Metallic Glass Conference), Gatlinburg, TN (May 2-5)

31. Specimen-geometry Effects on Mechanical Behavior of Metallic Glasses, BMG-IV (The

fourth International Bulk Metallic Glass Conference), Gatlinburg, TN (May 2-5, 2005)

32. *Fabrication and characterization of active matrix array for cell probing and screening,

Spring Materials Research Society Meeting, San Francisco CA (March 28-April 1, 2005)

33. *Electrical and microstructural characterization of molybenum tungsten electrodes using a

combinatorial thin film sputtering technique, Spring Materials Research Society Meeting,

San Francisco CA (March 28-April 1, 2005)

34. X-ray and Neutron Diffraction Phase Mapping of Hydrogen-Charged Zircaloy-4, The

International Centre for Diffraction Data (ICDD) Spring Meeting, Newtown Square, PA.

(March 14-18, 2005).

35. Synthesis of Ultrasharp Vertically Aligned Silicon Nanocones by Catalytic Plasma Enhanced

Chemical Vapor Deposition, Symposium KK: Kinetics-Driven Nanopatterning on Surfaces,

Fall Materials Research Society Conference, Boston MA (November 29-December 3 2004).

36. Recent Lithography Results from the Digital E-Beam Array Lithography (DEAL) Concept,

51st International American Vacuum Society Conference, Anaheim CA (November 14-19,

2004).

37. *Optimization of RF Magnetron Sputter Deposited Indium Tin Oxide (ITO) Transparent

Conductors using a Taguchi Statistical Method, 51st International American Vacuum Society

Conference, Anaheim CA (November 14-19, 2004).

38. *Localized Heating Effects During Electron Beam-Induced Deposition of Nanostructures,

51st International American Vacuum Society Conference, Anaheim CA (November 14-19,

2004).

39. *Combinatorial Synthesis of Rare Earth-doped Yttrium Aluminum Garnet Thin Film

Materials by using rf Reactive Magnetron Sputtering, 51st International American Vacuum

Society Conference, Anaheim CA (November 14-19, 2004).

40. *A Three - Dimensional Computer Simulation of Electron - Beam Induced Deposition

(EBID) 51st International American Vacuum Society Conference, Anaheim CA (November

14-19, 2004).

41. Catalytic plasma enhanced chemical vapor deposition of ultrasharp vertically aligned silicon

nanocones and their characterization, 51st International American Vacuum Society

Conference, Anaheim CA (November 14-19, 2004).

42. *Cathodoluminescence Imaging and Spectroscopy of Thin Films for Solid State Ultraviolet

EmittersMicroscopy and Microanalysis 2004, Savannah GA, (August 1-5, 2004).

44. Cathodoluminescence and Its Temperature Dependence of Tm-doped AlxGa1-xN Thin Films,

Nitride Workshop, Pittsburg PA (July 2004).

45. Combinatorial Cu-Ni Catalyst for VACNF Growth: a comparative study of Composition,

Growth Rate, Structure, Morphology, 48th International Conference on Electron, Ion, and

Photon Beam Technology and Nanofabrication, San Diego, CA (June 1-4, 2004).

46. *Combinatorial RF Magnetron Sputtering for Rapid Bulk Metallic Glass Alloy

Development, National TMS Meeting, Bulk Metallic Glass Symposium, Charlotte NC

(March 17, 2004).

47. Enhanced Blue Emission From Tm doped AlxGa1-xN Electroluminescent Thin Films,

Intneratinoal Semiconductor Device Research Symposium, Washington DC (December 10-

12, 2003).

48. Rapid Chemical and Structural Analysis of Ternary Phase Diagrams with Synchotron

Radiation, National Materials Research Society Fall Meeting, Boston MA (December 1-5,

2003).

49. *Electron Interactions in Nanoscale Focused Electron Beam Processing, 50th International

American Vacuum Society Conference, Baltimore MD (November 3-7, 2003).

50. *Vacuum Encapsulation of Micron-Sized Vacuum Field Effect Transistors, 50th International

American Vacuum Society Conference, Baltimore MD (November 3-7, 2003).

51. *Gadolinium-doped Yttrium Aluminum Garnet Ultraviolet Emitting Materials Deposited by

rf Reactive Magnetron Sputtering, 50th International American Vacuum Society Conference,

Baltimore MD (November 3-7, 2003).

52. *Gadolinium-doped Yttrium Oxide Thin Films Deposited by Radio-frequency Magnetron

Sputtering; Film Quality and Cathodoluminescence Properties, 50th International American

Vacuum Society Conference, Baltimore MD (November 3-7, 2003).

53. Digital Electrostatic E-beam Array Lithography (DEAL): Progress Toward Proof of

Massively Parallel, Low-Energy E-beam Lithography, Advanced Lithography Program

Review Microsystems Technology OfficeDefense Advanced Research Projects Agency,

Santa Fe, NM (May 5-8, 2003).

54. *Selective Nanoscale Electron Beam Stimulated Etching, National Materials Research

Society Spring Meeting, San Franscisco CA (April 21-25 2003).

55. *Gadolinium-doped Yttrium Oxide Ultraviolet Emitting Materials, National Materials

Research Society Spring Meeting, San Franscisco CA (April 21-25 2003).

56. *Pulsed Laser Deposition of SrS:Te Thin Films, National Materials Research Society Spring

Meeting, San Franscisco CA (April 21-25 2003).

57. *Nanoscale Electron Beam Stimulated Processing, Partnerships in Technology (PIT) Forum,

Oak Ridge TN (February 28, 2003).

58. *Soft electron beam etching for fine TEM sample preparation, 28th Annual SPIE

Microlithography Symposium, San Jose CA (February 23-28, 2003).

59. *Nanoscale Electron Beam Stimulated Processing, Processing at the Nanoscale Session, 49th

International American Vacuum Society Conference, Denver CO (November 4-8, 2002).

60. Ultraviolet Emitting SrS:Te Thin Films, Thin Films Session, 49th International American

Vacuum Society Conference, Denver CO (November 4-8, 2002).

61. *Nanoscale Electron Beam Stimulated Processing, XI International Materials Research

Congress, Cancun Mexico (August 25-29, 2002).

62. Ultraviolet Emitting SrS:Te Thin Films, XI International Materials Research Congress,

Cancun Mexico (August 25-29, 2002).

63. *Multi-layer Chromium-based Optical Coatings for 157nm Lithography, 48th International

Symposium of the American Vacuum Society (November 2001).

64. *Thin Film Growth of Reactive Sputter Deposited Tungsten-Carbon Thin Films, 48th

International Symposium of the American Vacuum Society (November 2001).

65. Composite Tantalum Nitride-Silicon Nitride Thin Films for 193nm Embedded Attenuated

Phase Shift Masks, 48th International Symposium of the American Vacuum Society

(November 2001).

66. Gray Bar Masking: Fabrication and Imaging for 193nm, Proceedings of the SPIE 21st Annual

Symposium on Photomask Technology, (October 2001).

67. *Materials Development and Current Transport in Vacuum Microelectronic Devices, 14th

Biennial University/Government/Industry Microelectronics Conference (June 2001).

68. *Solid State Display Technologies, Center of Electronic Imaging Systems Technology

Interchange, The University of Rochester (Feb 2001).

69. *Luminescence and Energy Transfer Mechanisms in Mn+2, Cr+3, and Eu+3 Doped ZnGa2O4,

6th International Conference on the Science and Technology of Display Phosphors, (Nov.

2000).

70. *Field Emitter Material Investigations for Vacuum Field Effect Transistors, 24th Annual

Western New York Chapter of the IEEE Electron Device Society Conference (Nov. 2000).

71. *Eu+3 and Cr+3 Doping for Red Cathodoluminescence in ZnGa2O4, 47th International

American Vacuum Society Conference (Oct. 2000)

72. Laser Based Processing of Next Generation Materials, Boston MA Chapter Meeting of the

American Vacuum Society (June 2000).

73. Field Emitter Material Investigations for Vacuum Field Effect Transistors, International

Vacuum Electronics Conference (May 2000).

74. *Deposition of Ceramic Materials Using Powder and Precursor Vehicles Via Direct Write

Processing, National Materials Research Society Spring Meeting (April 2000).

75. Epitaxial Thin Film Phosphors for Low Voltage FED Applications, National Materials

Research Society Spring Meeting (April 2000).

76. *Semiempirical Self Consistent Filed Modeling of the Ce+3 4f and 5d Energy Levels in

Solid State Luminescent Materials, National Materials Research Society Fall Meeting (Nov.

1999).

77. Laser Direct Writing of High-Resolution Phosphor Screens, National Materials Research

Society Fall Meeting (Nov. 1999).

78. Enhanced Luminescence in Epitaxial Oxide Thin Film Phosphors, Fifth International

Conference on the Science and Technology of Display Phosphors, (Nov. 1999).

79. The Effect of Carbon Deposit on Electron Beam Degradation of Oxide Thin Film Phosphors,

1999 National American Vacuum Society (Oct. 1999).

80. Materials for 157nm Lithography, Bay Area Chrome Users Society Meeting (Sept. 1999).

81. *AVT-RIT-NSF Partnership for the Development of Low Voltage Thin Film Phosphors for

Field Emission Display Devices, University Government Industry Microelectronics

Conference (June 1999).

82. Exploring Silicon Process Technology Through RIT s NPN BJT Process, University

Government Industry Microelectronics Conference (June 1999).

83. *Sputtering Luminescent Ta2Zn3O8 Thin Films, National Materials Research Society Spring

Meeting (April 1999).

84. Laser Induced Forward Transfer of Luminescent Particulate Materials, National Materials

Research Society Spring Meeting (April 1999).

85. Electron Beam Degradation of Oxide and Sulfide Thin Film Phosphors for Field Emmision

Displays, Florida Chapter American Vacuum Society Meeting (March 1999).

86. *Thin Film Characterization and Performance of Sputter Deposited SrxCa1-xGa2S4

Electroluminescent Phosphors, Rochester Institute of Technology Microelectronic

Engineering Seminar (Mar. 1998).

87. *Rare Earth and Transition Metal Doping of the Ta2Zn3O8 Phosphor for Low Voltage FED

Applications, 3rd International Conference on the Science and Technology of Display

Phosphors (Nov 1997).

88. *Crystal Field and Semiemperical Molecular Orbital Calculations on Ce+3 Doped Alkaline

Earth Sulfide Phosphors, 3rd International Conference on the Science and Technology of

Display Phosphors (Nov. 1997).

89. *Thin Film Electroluminescent Displays, Rochester Institute of Technology Microelectronic

Engineering Seminar (Nov. 1997).

90. *XPS Analysis and SCF/CI modeling of Ce+3 Core Level and Valence Level Electrons in

CaxSr1-xGa2S4, 1997 National American Vacuum Society (Oct. 1997).

91. *Microencapsulated Pixels for an Integrated Phosphor Field Emission Device, Upstate New

York Chapter of the American Vacuum Society (Aug. 1997).

92. *Photoluminescence and Thermal Quenching of Bound Excitons in (BaS)1-x(SrTe)x, Eighth

International Conference on II-VI Compounds (July 1997).

93. *Thin Film Electroluminescent Displays: Device Structure, Materials Properties, Device

Physics and Phosphor Development, Sandia National Laboratories (Apr. 1997).

94. Excitonic Emission from BaS:Te Phosphor Powders, Florida Chapter American Vacuum

Society Meeting (Feb. 1997).

95. *Semiempirical Calculation of 4f-5d Spectroscopy of Ce+3 in Metal Sulfide Host Crystals,

Sanibel Quantum Theory Conference (Jan. 1997).

96. *Blue Excitonic Emission from SrS:Te Phosphor Powders, Second International Conference

of the Science and Technology of Display Phosphors (Nov. 1996).

97. Luminescence, Absorption, and Site Symmetry of Ce Activeated SrGa2S4 Phosphors, Second

International Conference of the Science and Technology of Display Phosphors (Nov. 1996).

98. *Effects of Annealing and Stress on the SrS:Ce Thin Film Electroluminescent Phosphor,

1996 National American Vacuum Society Meeting (Oct. 1996).

99. XPS Measurement of ZnS Valence Bands, 1996 National American Vacuum Society

Meeting (Oct. 1996).

100. *Microstructural Changes and Their Effects on the Emission Spectra in SrS:Ce Thin Film

Electroluminescent Devices, 8th International Conference on Electroluminescence(July

1996).

101. XPS Valence Band and Fermi Level Analysis of ZnS, SrS, and CaxSr1-xGa2S4

Electroluminescent Phosphors, 1996 Florida Chapter American Vacuum Society (Feb. 1996).

102. *Negative Ion Re-sputtering Effects of rf Magnetron Sputter Deposited CaxSr1-xGa2S4

Thin Film Electroluminescent (TFEL) Phosphors, 1996 National Materials Research Society

Meeting (Apr. 1996).

103. *Variations in the Ce Radiative Transition by Oxygen Doping in the Ca0.55Sr0.45Ga2S4:Ce

Blue Electroluminescent Phosphor, First International Conference on the Science and

Technology of Display Phosphors (Nov. 1995).

104. *XPS Analysis of SrS:Ce and SrxCa1-xGa2S4:Ce Blue Thin Film Electroluminescent

(TFEL) Phosphors, 1995 National American Vacuum Society Meeting (Oct. 1995).

105. *Microstructural Evolution of Sputter Deposited SrxCa1-xGa2S4:Ce Electroluminescent

Thin Film Blue Phosphor, National Materials Research Society Spring Meeting (Apr. 1995).

106. *Brighter Blue SrxCa1-xGa2S4:Ce Electroluminescent Devices with an Electron Injection

Layer, 1995 National Society for Information Display (May 1995).

107. *Enhanced Electron Injection In Blue Electroluminescent Devices, 1995 Florida Chapter

American Vacuum Society (Feb. 1995).

RESEARCH FUNDING (University of Tennessee)

Funded Proposals

1. Title: Digital Electrostatic e-beam Array Lithography (DEAL)

Sponsor: Defense Advanced Research Project Agency (DARPA), Subcontract through

UT/Battelle

Total Award: $3.2 million (PDR share -- $343,178)

PI and all co-Pi s: (ORNL) D

Copyright 2003 Frost & Sullivan ISSN 0896-422X,

August 29, 2003.

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