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Process Design

Location:
China
Posted:
December 18, 2012

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Resume:

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Kangfa Deng's Resume

File Attachments:CV_dengkangfa.pdf (18.1 KB, application/pdf) attached by dkf5201314 (Kangfa Deng) on 2012-10-25 03:06CV

Contact Micro-nano Electronic Building,

Peking University

Beijing, Beijing 100871

CN

861**********

**********@***.***.****** To be a researcher in MEMS field

Skills MEMS inertial sensor design and fabrication

Qualifications 1.B.E. Electronics Science and Technology(2010)

Huazhong University of Science and Technology

Wuhan,China

2.M.S. Microelectronics Engineering and Solid State Electronics (2013)

Peking University

Beijing,China

RESEARCH EXPERIENCE

1 Design an inertial micro-switch (Jan-Oct 2012 )

The switch was designed to prolong contact time

A physical model of the switch was established to optimize the device structure and simulated by ANSYS and Simulink.

The switch was fabricated by bulk micromachining process(@National Key Laboratory of Micro/Nano Fabrication Technology at Peking University)

2 Study on BCB bonding process (Oct-Dem 2011)

Individual test of BCB bonding was passed to get the best term of the process

Flow behavior of BCB in adhesive bonding was studied so as to reduce transverse deformation of BCB structure

3 Design a differential piezoresistive pressure sensor (Jun- Oct 2011)

The position of the piezoresistive resistance was optimized by ANSYS

The process of piezoresistive resistance was simulated by Silvaco to meet the design demand

The sensor was fabricated by bulk micromachining process

4 Tapeout a piezoresistive accelerometer (Jan- May 2011 )

The sensor was fabricated by bulk micromachining process(@National Key Laboratory of Micro/Nano Fabrication Technology at Peking University)

Updated: 2012-10-25



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