Engineer Process

DMITRI KULIK

* *** * ********* * OVE

C EDAR P ARK, T X 7 8613

(P HONE ) 5-12-968-****

E MAIL : ******@*******.******.***

SUMMARY

Semiconductor Process Engineer with expertise in Thin Films and Metals. Experience in troubleshooting and

in process, cycle time and yield improvement. PhD in Physics with concentration in the Optics of

Semiconductor Nanostructures.

PROFESSIONAL EXPERIENCE

CYPRESS SEMICONDUCTOR, Round Rock, TX 2005-2009

Senior Process Engineer (Thin Films and Metals)

Sustained process, improved yield and cycle time. Supported Maintenance and Production in a high volume

manufacturing environment.

Significantly reduced scrap in Thin Films area by developing and implementing a new procedure for

tool qualification and capacitor dielectric film thickness measurements.

Significantly reduced tool downtime in Metals area by optimizing power compensation and recipe

deposition time equations on Endura PVD tools.

Owned six Novellus PECVD Dielectric, two Novellus Tungsten CVD, and five Endura 5500 PVD

tools and processes that run on the tools.

Owned new Endura PVD tool project from defining new tool acceptance criteria to new tool

qualification.

Established statistical process controls and tool qualification procedures.

Worked with maintenance as a team for tool improvement and troubleshooting.

Optimized process for yield and cycle time improvement.

Helped to advance Thin Films SPC team from Level 1 to Level 6 in one year.

Developed and maintained Failure Mode and Effect Analysis for Thin Film and Metal areas.

Analyzed and presented experimental data to Process Change Review board. Presented at

semiannual Statistical Process Control corporate audits.

Designed and run experiments on a sputter tool for a thermoelectric power generator R&D project.

NANO ELECTRONIC MATERIALS RESEARCH GROUP 1996-2003

UNIVERSITY OF TEXAS AT AUSTIN

Graduate Research Assistant

Developed an optical spectroscopy system with subwavelength spatial resolution.

Developed and built a Near-Field Scanning Optical Microscope (NSOM) operating in high vacuum

at cryogenic temperatures.

Researched optical properties of self-assembled III-V semiconductor quantum dots and single CdS

nanorods. The findings were reported at scientific conferences and in major scientific journals.

ADVANCED MICRO DEVICES, FAB25, Austin, TX 2001-2002

Co-op Engineer at Etch/Wet Clean Module (2001-2002)

Supported product ramp up in FAB25.

Developed SEZ 4200 wet clean tool capacity model to project future needs of FAB25.

Assisted with a new SEZ 4200 tool qualification project for various layers of metals and contacts.

Co-op Engineer at Process Characterization and Analysis Lab (2001)

Performed Atomic Force Microscopy (AFM) study of surfaces of metals and polysilicon with the

goal of comparative analysis of polycrystalline grains.

2

DMITRI KULIK

Analyzed Total X-ray Reflection Fluorescence (TXRF) daily data from various fab modules for tool

qualifications.

UNIVERSITY OF TEXAS AT AUSTIN FALL 1995 & SPRING 1999

Graduate Teaching Assistant

Taught physics problem solving sessions to a total of 280 undergraduate students.

AMERICAN TECHNOLOGY MANUFACTURING, Pawtucket, RI 1992-1994

Group leader

Managed and trained a group of 10 people. Electro-mechanical assembly, test, troubleshooting, and quality

control.

WALLACE-FISHER INSTRUMENT CO. INC., Pawtucket, RI 1992

Laboratory Technician

Research and development of an ambient air pollution sensor.

INSTITUTE OF LOW-TEMPERATURE PHYSICS AND TECHNOLOGY, Kharkov, Ukraine

1988-1990

Research Assistant

Developed semiconductor thin film IR optical filters with improved transmission spectra at the

cryogenic temperatures.

KHARKOV STATE UNIVERSITY, Kharkov, Ukraine 1986-1988

Research Assistant

Developed semiconductor thin film IR optical filters with specific transmission spectra at the

room temperature.

EDUCATION

PhD, Condensed Matter Physics, University of Texas at Austin

B.S., Physics, Kharkov University, Ukraine

SKILLS

JMP TXRF, SEM, AFM

Statistical Process Control Spectroscopy, Optics, Fiber-optics

Components of Variance Ellipsometry

Design of Experiment Near-Field Scanning Optical Microscope (NSOM)

Failure Mode and Effect Analysis Cryogenic and High Vacuum Techniques

(FMEA)

Root Cause Analysis Mechanical Design and Machining (lathe, milling machine)

PATENTS

"Method for using Total Reflection X-Ray Fluorescence in Semiconductor Manufacturing,” A. R. Ghatak-

Roy, M. McBride, T. Z. Hossain, and D. Kulik.

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