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Engineer Process

Location:
Glen Allen, VA, 23059
Posted:
March 09, 2010

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Resume:

Weiming He

***** *** ******* ****

Glen Allen, VA 23059

804-***-****

abnn4j@r.postjobfree.com

Professional Profile:

• Ph.D. in Electrical Engineering with extensive knowledge in Solid Physics,

Material Science, surface analysis and material characterization

• More than 6 years experience in semiconductor industry in R&D or manufacturing

environment

• Process engineer experience in semiconductor industry with proven record of

success on technology transfer, process optimization and failure analysis, defect

reduction

• Demonstrated ability of interfacing cross-functional organizations

• Experience in process improvement, project management, problem solving and

data analysis skills

Professional Experience:

Infineon/Qimonda, Sandston, VA 2005-2009

CMP Process Engineer & Metrology Engineer

• Transfer products and processes from R&D to Production

• Developing and optimizing recipes for new & existing products

• Establish procedures and qualification plan for brining new processes on line

• Provide troubleshooting assistance for manufacturing processes

• Perform process characterization to document new and existing processes/products

• Perform capability, repeatability and cost analysis on processes

• Support downstream customers and new product development

• Implement SPC and FDC for process/tool control

• Analyzing and preparing reports of experiments & process/tool releases

• CMP process owner and CMP online metrology (Nova) tool owner

• Cost reduction and productivity improvements using lean six sigma manufacturing

skills

Oregon Graduate Institute, Beaverton, OR, 2002-2004

Research Assistant,

• High-dielectric gate oxide deposition by atomic layer deposition (ALD)

• Hands-on experience on film characterization by Spectroscopy Ellipsometer, AFM,

SEM, XRD, optical microscopy for analysis of thickness, microstructure and

composition.

• Hands-on experience on device electrical characterization, including wafer probe

station, HP/Agilent semiconductor parameter analyzers.

Fujitsu Microelectronics Inc., Gresham, Oregon, 2001-2002

Yield Analysis Engineer

• Instrumentally identified the root cause of problem lots; delivered engineering

resolution to manufacturing group

• Led engineering team and drove optimization of process flows

• Performed parametric troubleshooting on semiconductor devices

• Characterize and identify yield limiting failure mechanisms through data analysis

and fail bit map techniques

• Correlate defects to yield loss and identify baseline defectivity opportunities

• Find root cause for inline excursion and provide solution recommendation

Auburn University, Auburn, AL, 1998-2000

Research Assistant

• Hands-on experience on epitaxial growth and characterization

• Hands-on experience on thin film deposition (oxide and metal deposited by

evaporation and sputtering), plasma/wet etching, rapid thermal annealing,

photolithography

Alphatec Electronics Corporations, Shanghai, China, 1991-1998

IC Packaging Process Engineer

• Qualified new IC packaging equipment and process

• Collected and analyzed data to sustain the process

• Interface with other engineering groups and vendors for quality goal

• Participates in design reviews for product and process compatibility

• Developed process improvement in yield, work flow

• Perform reliability test

Technique Skills:

• Experience in quality management tools (Lean 6 sigma, 8D, FMEA)

• Hand-on experience with AFM, SEM, EDS, crystal x-ray diffraction, SE, optical

microscopy

• Software skills on JMP, SPC, DOE, Knights Yield Analysis, PCA, MatLab,

AutoCAD

• Experience in semiconductor parameter analyzers (capacitance-voltage, Current-

voltage), network analyzer

Education:

• Ph.D., Electrical Engineering, Oregon Graduate Institute, OR, 2004

• M.S., Materials Science, Auburn University, AL, 2000

• B.S., Materials Science, Shanghai JiaoTong University, China, 1991

Publication:

• Weiming He, Steven Schuetz, Raj Solanki, John Belot, and James McAndrew,

“Atomic Layer Deposition of Lanthanum Oxide Films for High-kappa Gate

Dielectrics “, Electrochem. Solid-State Lett. 7, 2004, G131-133

• W. He, R. Solanki, J. F. Conley, Jr., and Y. Ono, “Pulsed deposition of silicate

films”, J. Appl. Phys., Vol 94, No 5, 2003, pp. 3657-3659



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