Manager Engineering
Resume:
MICHAEL D. PLANER
Fremont, CA 94536
510-***-**** (mobile)
********@*********.***
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I am an accomplished Director/Manager with many years of experience in CMOS
semiconductor, disk drive, MEMS and semi-based optical technology
manufacturing. I have directed/managed multiple departments such as;
Equipment Engineering, Facilities Operations, Chemical Operations and
Environmental, Health & Safety as well as IT: concurrently.
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Representative Capabilities
. Expert knowledge of high purity toxic gas systems delivery systems;
with extensive knowledge of TGO requirements.
. Large (300gpm) through small scale (16gpm) RO/DI, 18+MOhm water
systems, selection, installation and day-to-day operations and
maintenance.
. Extensive knowledge of HVAC systems, both "air handler" and "package
unit" type systems with a major focus on multi-class clean-room
systems from class 10 to class 100,000. Air quality abatement
systems, corrosive and VOC selection, design, installation and routine
operation.
. Extensive knowledge of building and life/fire safety codes with regard
to both equipment and facility installations concerned with new
construction, expansion and day-to-day operations.
. Expert knowledge of hazardous materials and workplace safety with
regard to Cal/OSHA, Fed OSHA, regional and federal EPA and wastewater
discharge regulations.
. Design, installation and routine operation of heavy metal removal and
acid neutralization wastewater treatment systems in compliance with
COPA, State and Federal requirements.
. Installation and routine support of equipment involving, High Vacuum
Systems; including equipment such as metal sputtering, vacuum
deposition, LPCVD, PECVD and associated toxic gas systems.
. Lithography systems include; Nikon, Canon Aligners and Ultratech 1:1
& 5:1 microlithography.
. Major experience in PECVD and LPCVD systems in support of CMOS and
MEMS fabrication technology, extensive knowledge with regard to LPCVD
Systems, focusing on low stress nitride (<100 MPa) from both a
process and equipment engineering perspective; my efforts accomplished
a 40 wafer load size with <40 MPa variance (40 to 80 MPa) in a
horizontal, 3 zone system.
. Expert knowledge of Alcatel and STS, DRIE systems from both a process
and equipment engineering perspective with regard to MEMS process
engineering.
. TS-16949 and ISO-9000 systems and procedural requirements; multiple
audit experience as well as initial certification preparation.
Covering equipment maintenance operations and QA level calibration.
Extensive experience in real estate selection; lease review and
negotiation for cleanroom manufacturing systems.
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REPRESENTATIVE ACCOMPLISHMENTS
. An expert with regard to LPCVD Systems. Proven ability to extend load
size and pump life with a better than 90% uptime. Invented a new
horizontal gas distribution system which extended load size and
reduced variation within a 60 wafer load.
. Responsible for all aspects of the design and construction of a 24,000
sq/ft class 10 cleanroom for an optical component manufacturer. This
$15 million project established production facilities for the company.
. Team member for the design and construction of a 55,000 square foot,
Class 10 cleanroom. This 70 million dollar fab expanded fabrication
facilities for a disk drive- head manufacturer.
. Reconditioned and brought into specification a 10,000 square foot,
Class 100 cleanroom for a midsized MEMs manufacturer.
. Designed and installed numerous wastewater treatment systems. These
systems range from heavy metal removal to simple neutralization
continuously treated between 30 and 300 gallons of wastewater per
minute and are fully automated with no full time requirement for
operators.
. Closed a 25 year old gallium arsenide production facility containing a
6000 square foot class 100 cleanroom in Santa Clara. This closure was
completed under budget and in record time with authorities commenting
it was "the finest closure they had ever seen."
. Appointed to Union Sanitary District's (USD) Industrial Advisory
Counsel by their Board of Directors. This 7 member council served as
a bridge between USD and the regulated community.
. Extensive engineering knowledge of manufacturing equipment & defect
reduction, for single and double-sided polished wafers, from 900
micron to 200 micron wafer thicknesses in multiple wafer formats.
. Achieved an 11% improvement in yield with regard to scratch and
particle defects on double-sided, polished & thin to ultra-thin wafers
to support MEMS manufacturing through re-engineered "end-effectors"
employing new engineered coatings and redesign of standard SEMI-
Standard wafer handling equipment.
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CHRONOLOGY
. On August 4th of 2008 I was recruited by Neoconix; a start-up company,
located in Sunnyvale, CA, as Manager of Equipment Engineering and
Facilities. My primary role in this small, 65 employee company; is
to transition the firm from an R&D environment to a sustainable and
reliable production facility. My normal employment ended on 3/31/10,
however I continue as a consultant for the firm on a part-time basis.
. From August of 2004, until May of 2008, I was employed by Silicon
Microstructures, Inc., a MEMS fabrication facility, as Equipment &
Facilities Manager. I managed multiple departments including
Equipment Engineering & Maintenance, Facilities, Chemical Operations
and EH&S, totaling 11 direct reports.
. In April of 2002 I was employed by Filtronic Solid State, a GaAs wafer
fabrication facility: as Director of Line Maintenance, Facilities and
EH&S. As Director, I was responsible for day to day operations of four
departments and 10 employees, until the facility closed in June of
2004; I closed the facility and was the last employee.
. In spring of 2000, I was recruited by Gemfire Corporation, an optical
component, semi-scale manufacturer start-up as Facilities/EH&S. I was
responsible for the rebuilding of a 24,000 sq/ft Class 10 cleanroom
manufacturing facility. Following the collapse of the
telecommunications market and subsequent 75% RIF, my employment ended
in February of 2002.
. I joined Willis Corroon in 1997 as an Assistant Vice President to
provide safety and environmental consulting services for the insurance
brokerage's high technology clients that included; Ultratech, Palm,
San Jose Medical Center, Turner Construction and Bell Carter. I left
the company in February of 2000 to join Gemfire Corp.
. Recruited by Read-Rite Corporation, in 1991, to direct all
Facilities/EH&S activities for this multinational company. I was also
responsible for all corporate security operations. Until I left the
company in 1997. Major responsibilities included EH&S, wastewater
treatment; and design and build-out of a new major production
facility.
. From 1985 until 1991 when I was recruited by Read-Rite, I was employed
by International Microelectronic Products, as Manager,
Facilities/EH&S, with responsibility for cleanroom operations,
expansion, equipment installations, safety, environmental and security
operations, for this $600M semiconductor foundry.
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EDUCATION AND ACHIEVEMENTS
Have attended classes (off & on) since 1996 to complete a Bachelor's Degree
in Environmental Engineering (current GPA: 3.7). Courses with honors
(including Dean's List every quarter) include chemistry through organics',
vector physics, geology, senior level English & psychology studies
including advanced mathematics at DeAnza & Ohlone College.
In September of 2000 completed a course of study in Laser Safety from the
Laser Institute of America; and I am currently a certified Laser Safety
Officer.
Completed an extensive course of study in Hazardous Materials Management
from the Institute of Hazardous Materials Management and received national
credentials as a Certified Hazardous Materials Manager (CHMM, #06046),
Senior Level; expired.
Completed multiple professional courses of study in environmental, health
and safety, with a major focus on EH&S law.
Completed a sixteen week course in Total Quality Management.
I have received certifications for 40 hour; EPA Emergency Response, and
trained ERT Teams in multiple countries for the past 20years. In addition,
I am certified as a "Confined Space Entry Supervisor," HAZWOPR and EPA
Emergency Response trained "Incident Commander."
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Outstanding references are available.
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