Process Manager

Sooleng Toh

***** ****** ***** **** ****: 214-***-****

Frisco, Texas 75035 abh9ph@r.postjobfree.com

Professional Profile

A highly motivated / accomplished bilingual process engineer with expertise

in process development and project execution in the semiconductor

manufacturing industry. Coordinated international technology transfers.

Championed organizational efficiency improvements by initiating

multifunctional teams to integrate business and technical objectives.

Functional expertise include:

New Process Transfer Cost Control Critical Problem

Process Six Sigma Solving

Development/Improvement Statistical Process Project Management

Technical Training Control Fab Startup and

Conversion

Accomplishments

. Coordinated technology and product transfer from Carrolton to

Singapore/Europe/Foundry according to company standards covering over 24

different Technologies, over 500 different products.

. Managed and coordinated fab wide deployment of Advanta for run to run

control in photo which led to reduction of reworks by 5% and Maestria in

etch/diffusion/films to capture and reduce excursions.

. Experienced in Process Simplification, Process optimization, Solution

implementations, Yield Enhancement and having ability to identify,

analyze and solve problems to meet quality Standard for customer

Satisfaction.

. Managed and coached a team of engineers in the startup of DCVD/EPI

department in an 8 inch facility in Singapore.

. Six Sigma Green Belt Certified.

Professional Experience

ST Microelectronics Inc., Carrollton, Texas 1998 - 2009

(6-inch, BICMOS & CMOS fab)

Process Engineering Transfer Coordinator (2007 - 2009)

. Defined transfer strategies and coordinate all transfer activities

involving process engineering, equipment, IT, facilities and backend

engineering activities ensure that technology is transferred as per

master schedule

. Resolved any process related issues during technology transfer.

. Interacted with internal and external ISO auditors as part of ISO

surveillance and recertification audits.

Process Technical Committee Coordinator (2004 - 2007)

. Coordinated global technical exchange between company sites and

identifying key projects for local implementation.

. Supported the local organization to ensure fast deployment of solutions

with already validated payback (2 months from project initiation to qual

lot processed)

Advanced Process Control Coordinator (2004 - 2007)

. Deployed Advanced Process Control strategies fabwide, Adventa. for run to

run dose control in photo and maestria on tools in etch/diff/films.

. Improved:

> Time spent on performing manual dose compensation on the stepper is

reduced

> Incorrect dose compensation on stepper job due to human error is

reduced

> Improved Run to Run CD should improve the rework rate. Run to Run has

just been introduced into production. Rework rate and CPK will need

to be determined to confirm this

> Help Engineering with resist conversion project

Senior Thinfilm Process Engineer/Defectivity Champion (2002 - 2004)

. Optimized process, capacity and cost improvement and yield improvement

for PVD/RTA/WCVD/WEB/DCVD.

. Automated qual sheets online to improve data integrity.

. Championed equipment productivity improvement team

Sooleng Toh

Page Two

ST Microelectronics Inc. (Continued)

Thinfilm Section Manager, Singapore (2000 - 2001)

(AMK8), (8-inch, 0.35( BICMOS6M, 0.15 & 0.13( Flash Memory fab)

. Procured equipments for fab startup for AMAT HDP Ultima, DXZ, SACVD, ASM

EPI. Worked with ATD (Advance Technology Transfer group) to understand

BICMOS process complexity and limitations to provide support to Singapore

facility to prepare 8 inch facility.

. Oversaw all tool inspections, installations and process setup for AMAT

HDP Ultima, DXZ, SACVD, ASM EPI. Coordinated activities between

facilities and vendors to ensure smooth startup.

. Coached, mentored, and trained 6 engineers for the startup of DCVD/EPI

department.

. Transferred BICMOS (0.35 process from Crolle and optimized all DCVD/EPI

to achieve 98.9% process yield for this product.

Thinfilm Section Manager, Phoenix, Arizona (1998 - 2000)

(PF1), (8 inch 0.35( BICMOS6M fab)

. Mentored and coached a group of 37 engineers and 12 technicians ensuring

that training objectives are met.

. Coordinated tool installation such as Centura HDP Ultima, MXP Plus Etch

Chamber retrofit using P5000s, Centura WXZ.

. Setup process for new product transfer for HCMOS7, HF5CMOS and BICMOS4.

. Improved throughput of P5000s and Centuras by 30%.

. Established the Specifications system for P5000s TPM program as part of

the area focus team to improve cycle time. Also worked to compile all

process, PM and Corrective Action Specifications for P5000s. to improve

uptime.

. Improved process though correlating the EWS failure/T84 parametric

results with process steps and determined the root cause of the device

failure.

Previous Positions include:

Thin Film Section Manager

Process Engineering Coordinator, Diffusion Module

Senior Process Engineering, Etch module

Process Engineering, Photo module

Award and Achievements

FTM Award 2006 for periodic NF3 Cleaning by time

Collaborated on the following publications:

. High Via1 Chain Resistance resulting from excessive soft sputter etch

and thick titanium layer deposited at a high temperature

. The study of an Intermittent Mechanical Particle Generation in the

tungsten etch back chamber

. Premature failure of the ceramic purge ring due to tungsten buildup

. Study of liquid like defects post tungsten etch back step

US Permanent Resident

Education / Training

University of Dallas Texas - Supply Chain Management Certification 2008

National University of Singapore - Master of Science in Microelectronics

Nanyang Technological Institute - Second Class Honor in Bachelor of

Engineering in EEE[pic]

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