Trinh T. Robertson

*** ***** *****

Fort Collins, CO 80525

Mobile: 505-***-****

acwb48@r.postjobfree.com

SUMMARY

** *** ********** ** ************* Manufacturing spanning multiple job functions from Manufacturing Technician, to Equipment Engineer and ultimately Process Engineer. Experience in sustaining 200 and 300mm ASM, Kokusai and TEL vertical diffusion furnaces and AMAT Centura single wafer chamber. As a Tool Owner, work aggressively to resolve tool issues, partner with Defect Reduction and Integration engineers to address inline defect and parametric issues, identify and implement continuous improvement projects and provide mentoring to Manufacturing Technicians and Junior engineers.

EXPERIENCE

Senior Diffusion Process Engineer December 2005 – August 2015

Intel Corporation

2400 Sara Road, Rio Rancho, New Mexico 87124

Process owner for Spacer Nitride on the 300mm Kokusai Quixace platform for the 32nm technology node. Responsibilities include daily monitoring of defect and parametric data and generating game plans to address issues. Assuring toolset meets or exceeds availability requirement to insure factory meets commitments. Identify and implement continuous improvement projects.

Co-lead the Mid Section Integrated Defect Team. Daily responsibilities consist of ensuring all high impact defect issues have closure, drive continuous improvement defect reduction activities for the Mid-Section and make quality decisions for the Team. Leads taskforce to drive closure in the EDI gap.

Process engineer responsible for the Oxide, Nitride, Polysilicon and Cure processes on 300mm ASM A412 vertical diffusion furnaces on the 32/45/90nm technology nodes. Applied LEAN manufacturing Methodologies to eleminate several sources of waste associated to manufacturing process.

Supported the home team in the 32 and 45nm technology transfer to HVM from the development site in Oregon. As home team support, responsibilities included the qualification of new tools and new processes in advance of the seed engineer’s return. Completed several tool conversions from the 45nm technology node to the 32nm technology node.

Improvement Projects included 1. SiC boat for defect reduction on Nitride Process for both Kokusai and ASM furnaces. 2. DCE clean recipe modification and extension to improve defect post clean and tool availability. 3. Quartz Extensions for both Nitride and Poly processes for cost reduction. 4. Qualified tool share across technology nodes to improve tool utilization.

As a senior Process Engineer, provided mentorship for Process Engineering Technicians and Junior Process Engineer. Created training documents and trained technicians and peers on how to use APC and BPC to control Oxide, Ntride, and Poly processes.

Use MBPS methodology to quickly arrive at root cause and implement solutions that are structured and standardized. Used this methodology to solve an EOL parametric on the Polysilicon process and to solve Nitride boat rail particle failure.

Prior responsibility included sustaining the Nitride Process on the 200mm Kokusai Vertron III platform. In that role completed several high impact projects such as 1. Nitride Quartz Change Extension improving avaiability by 33% and quartz saving over 300K per year. 2. Reduced Particle and unnecessary scrap related to early Nitride Quartz Life with the development and implementation of a new coat recipe and completed analysis that shows early quartz life particle failure has no impact to EOL yield.

Diffusion Equipment Engineer January 2000 - December 2005

TowerJazz Semiconductor

4321 Jamboree Road, Newport Beach, California

Coordinate equipment PMs, improvement projects, upgrades, and new tool installations with Production Supervisors.

Conduct weekly BTI Core Team meeting with Process Engineers, Production Managers, and Industrial Engineers to review tool performance, issues and upcoming projects.

Incorporated numerous fundamental improvements to the maintenance process which measurably improved systems integrity and quality control.

Supported technicians by providing technical expertise troubleshooting equipment related issues, process related issues, and the use of Apex support.

Developed PM procedures and checklists and implemented them in the ISO 9001 and Midas Equipment Tracking systems.

Wrote New Tool Equipment Specifications and conducted Source Inspections.

Established Statistical Process Control for all relevant equipment parameters.

Equipment Technician July 1996 - December 1999

Performed scheduled and unscheduled PMs on the KSEC furnaces, and AMAT HTF chambers.

Worked with the Equipment Engineers to implement improvement projects.

Assisted Equipment Engineer in Developing Equipment PM Procedures and Checklists.

Conducted training sessions on AMAT HTF Chamber.

Troubleshot numerous tool issues under loose supervision of Engineer/Senior Techs.

Worked with Senior Technicians and Vendors on projects and hard down equipment.

Mentored junior technicians on Equipment Troubleshooting.

Worked closely with Senior Techs, KSEC vendors and Equipment Engineers to learn Vacuum System, Heat Control, Pressure Control and Gas Flow, etc.

Performed Level I PMs.

EDUCATION

DeVry Institute of Technology June 1996

Pomona, CA

BS in Electronics Engineering Technology

G.P.A. 3.63/4.0 Dean’s List (9 Semesters)

Honors Graduate

Vice-president of Tau Alpha Pi (TAP) National Honor Society

Bilingual – English/Chinese

STRENGTHS

Solid sustainer, tool ownership, disciplined, quick learn, quality-minded, excellent team player

SKILLS

Equipment:

Kokusai Quixace (SPNdf) 300mm Vertical Furnace.

ASM A412 300mm CVD and Atmospheric Vertical Furnaces

Kokusai/Vertron 200mm CVD Vertical Furnace

Kokusai /BTI 200mm CVD and Atmospheric Vertical Furnaces

Applied Materials 5200 Centura HTF Chambers

TEL Alpha 8SE Ultra Thin Oxide Vertical Furnace

Software:

JMP/Crystal Ball/SQL Pathfinder

MES/CLUI/FSUI/RCT/APC/Klarity/Pattern, PCSA, ASM A412 Supervisor.

MS-Project, Word, Excel, PowerPoint, etc.

Production Indicators: FLGI,Ue,Downtime Indicator,

eMRCL,Fuzion, TAG, REV

Apex (Recipes & SPC Management) for 200mm Kokusai/BTI Vertical Furnace.

X-site/Midas (PM management and MTBF, MTTF, Tool Pareto, etc.)

REFERENCE

Available Upon Request

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